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- W2026136257 abstract "The epitaxial growth of titanium nitride (TiN) films, formed by implanting nitrogen ions (N 2 + ) with 62 keV into 100-nm-thick Ti films grown on NaCl substrates held at 250°C, has been studied mainly by transmission electron microscopy. It has been revealed that (001)-oriented TiN y is epitaxially grown by N-implantation into the as-grown (03·5)-oriented hcp-Ti. The nitriding mechanism of epitaxial Ti thin films is discussed." @default.
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- W2026136257 date "1997-04-01" @default.
- W2026136257 modified "2023-10-17" @default.
- W2026136257 title "Titanium Nitride Thin Films Epitaxially Grown by N-Implantation" @default.
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- W2026136257 doi "https://doi.org/10.1143/jjap.36.2323" @default.
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