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- W2026137881 endingPage "L1150" @default.
- W2026137881 startingPage "L1150" @default.
- W2026137881 abstract "This letter reports on the impact of gate microstructure on deep-submicron complementary metal-oxide-semiconductor (CMOS) device performance. Transistors with different gate microstructures (α-Si gate vs poly-Si gate) were fabricated using a 2.5 V sub-0.25 µ m CMOS process and their performances were compared. The α-Si gate provides better capability for suppressing boron penetration in p-channel metal-oxide-semiconductor field-effect transistors (MOSFET's), but the depletion effect is more severe than that of the poly-Si gate. A modified gate doping (MGD) effect, in which the difference of linear transconductance ( g m ) between transistors with two different gate microstructures shows a strong gate-length dependence, is reported for the first time and evaluated by the impact of grain boundary segregation on the electrically activated gate impurity density. The MGD effect makes the poly-Si gate more advantageous in the design of high-performance CMOS transistors with gate critical lengths shorter than 0.25 µ m." @default.
- W2026137881 created "2016-06-24" @default.
- W2026137881 creator A5042761297 @default.
- W2026137881 creator A5057901524 @default.
- W2026137881 creator A5058605789 @default.
- W2026137881 creator A5075665437 @default.
- W2026137881 creator A5085106860 @default.
- W2026137881 date "1997-09-01" @default.
- W2026137881 modified "2023-10-16" @default.
- W2026137881 title "Impact of Gate Microstructure on Complementary Metal-Oxide-Semiconductor Transistor Performance" @default.
- W2026137881 cites W1971075010 @default.
- W2026137881 cites W1984554363 @default.
- W2026137881 cites W2004253981 @default.
- W2026137881 cites W2037627099 @default.
- W2026137881 cites W2039259163 @default.
- W2026137881 cites W2065341816 @default.
- W2026137881 cites W2104049166 @default.
- W2026137881 cites W2124150389 @default.
- W2026137881 cites W2126814045 @default.
- W2026137881 cites W2159309186 @default.
- W2026137881 doi "https://doi.org/10.1143/jjap.36.l1150" @default.
- W2026137881 hasPublicationYear "1997" @default.
- W2026137881 type Work @default.
- W2026137881 sameAs 2026137881 @default.
- W2026137881 citedByCount "1" @default.
- W2026137881 crossrefType "journal-article" @default.
- W2026137881 hasAuthorship W2026137881A5042761297 @default.
- W2026137881 hasAuthorship W2026137881A5057901524 @default.
- W2026137881 hasAuthorship W2026137881A5058605789 @default.
- W2026137881 hasAuthorship W2026137881A5075665437 @default.
- W2026137881 hasAuthorship W2026137881A5085106860 @default.
- W2026137881 hasConcept C119599485 @default.
- W2026137881 hasConcept C127413603 @default.
- W2026137881 hasConcept C145598152 @default.
- W2026137881 hasConcept C165801399 @default.
- W2026137881 hasConcept C166972891 @default.
- W2026137881 hasConcept C172385210 @default.
- W2026137881 hasConcept C191897082 @default.
- W2026137881 hasConcept C192562407 @default.
- W2026137881 hasConcept C2361726 @default.
- W2026137881 hasConcept C2778413303 @default.
- W2026137881 hasConcept C2779283907 @default.
- W2026137881 hasConcept C46362747 @default.
- W2026137881 hasConcept C49040817 @default.
- W2026137881 hasConcept C51140833 @default.
- W2026137881 hasConcept C87976508 @default.
- W2026137881 hasConceptScore W2026137881C119599485 @default.
- W2026137881 hasConceptScore W2026137881C127413603 @default.
- W2026137881 hasConceptScore W2026137881C145598152 @default.
- W2026137881 hasConceptScore W2026137881C165801399 @default.
- W2026137881 hasConceptScore W2026137881C166972891 @default.
- W2026137881 hasConceptScore W2026137881C172385210 @default.
- W2026137881 hasConceptScore W2026137881C191897082 @default.
- W2026137881 hasConceptScore W2026137881C192562407 @default.
- W2026137881 hasConceptScore W2026137881C2361726 @default.
- W2026137881 hasConceptScore W2026137881C2778413303 @default.
- W2026137881 hasConceptScore W2026137881C2779283907 @default.
- W2026137881 hasConceptScore W2026137881C46362747 @default.
- W2026137881 hasConceptScore W2026137881C49040817 @default.
- W2026137881 hasConceptScore W2026137881C51140833 @default.
- W2026137881 hasConceptScore W2026137881C87976508 @default.
- W2026137881 hasIssue "9A" @default.
- W2026137881 hasLocation W20261378811 @default.
- W2026137881 hasOpenAccess W2026137881 @default.
- W2026137881 hasPrimaryLocation W20261378811 @default.
- W2026137881 hasRelatedWork W1613844570 @default.
- W2026137881 hasRelatedWork W1673695041 @default.
- W2026137881 hasRelatedWork W2051103728 @default.
- W2026137881 hasRelatedWork W2165638113 @default.
- W2026137881 hasRelatedWork W2322780449 @default.
- W2026137881 hasRelatedWork W2341064152 @default.
- W2026137881 hasRelatedWork W3150325146 @default.
- W2026137881 hasRelatedWork W3150849946 @default.
- W2026137881 hasRelatedWork W3161369427 @default.
- W2026137881 hasRelatedWork W3211886203 @default.
- W2026137881 hasVolume "36" @default.
- W2026137881 isParatext "false" @default.
- W2026137881 isRetracted "false" @default.
- W2026137881 magId "2026137881" @default.
- W2026137881 workType "article" @default.