Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026179199> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2026179199 abstract "The conventional wisdom to guarantee high purity thin films in IBSD has been to use a large vacuum chamber usually in excess of 1 m 3 . The chamber size was important to minimise the effect of reflected high energy particles from the target surface sputtering chamber materials onto the substrate and to allow the use of large targets to avoid beam overspill onto chamber furniture. An improved understanding of beam trajectories and re-sputtered material paths has allowed the deposition of thin films with very low metallic impurity content in a chamber volume below 0.5 m 3 . Thus, by optimizing the sputter ion source, target and substrate configuration, and by arranging suitable shielding made of an appropriate material in the process chamber, the levels of contaminants in the deposited films have been reduced to a minimum. With this optimum hardware arrangement, the ion beam process parameters were then optimized with respect to the ppm levels of contaminants measured in the films by SIMS analysis. Using the deposition of SiO 2 as a standard material for DSIMS composition analysis and impurity level determination, it has been shown that our IBS deposition tool is capable of depositing films with contamination levels of <50ppm for the total of all metal impurities in the deposited films." @default.
- W2026179199 created "2016-06-24" @default.
- W2026179199 creator A5058458873 @default.
- W2026179199 creator A5071797822 @default.
- W2026179199 creator A5075688691 @default.
- W2026179199 date "2013-09-26" @default.
- W2026179199 modified "2023-09-23" @default.
- W2026179199 title "Contamination control in ion beam sputter-deposited films" @default.
- W2026179199 doi "https://doi.org/10.1117/12.2025534" @default.
- W2026179199 hasPublicationYear "2013" @default.
- W2026179199 type Work @default.
- W2026179199 sameAs 2026179199 @default.
- W2026179199 citedByCount "0" @default.
- W2026179199 crossrefType "proceedings-article" @default.
- W2026179199 hasAuthorship W2026179199A5058458873 @default.
- W2026179199 hasAuthorship W2026179199A5071797822 @default.
- W2026179199 hasAuthorship W2026179199A5075688691 @default.
- W2026179199 hasConcept C111368507 @default.
- W2026179199 hasConcept C112570922 @default.
- W2026179199 hasConcept C113196181 @default.
- W2026179199 hasConcept C118442862 @default.
- W2026179199 hasConcept C120665830 @default.
- W2026179199 hasConcept C121332964 @default.
- W2026179199 hasConcept C127313418 @default.
- W2026179199 hasConcept C151730666 @default.
- W2026179199 hasConcept C159985019 @default.
- W2026179199 hasConcept C168834538 @default.
- W2026179199 hasConcept C171250308 @default.
- W2026179199 hasConcept C178790620 @default.
- W2026179199 hasConcept C185592680 @default.
- W2026179199 hasConcept C18903297 @default.
- W2026179199 hasConcept C19067145 @default.
- W2026179199 hasConcept C192562407 @default.
- W2026179199 hasConcept C22423302 @default.
- W2026179199 hasConcept C2265751 @default.
- W2026179199 hasConcept C2777289219 @default.
- W2026179199 hasConcept C2777527079 @default.
- W2026179199 hasConcept C2816523 @default.
- W2026179199 hasConcept C43617362 @default.
- W2026179199 hasConcept C49040817 @default.
- W2026179199 hasConcept C50774322 @default.
- W2026179199 hasConcept C64297162 @default.
- W2026179199 hasConcept C71987851 @default.
- W2026179199 hasConcept C86803240 @default.
- W2026179199 hasConcept C93106096 @default.
- W2026179199 hasConceptScore W2026179199C111368507 @default.
- W2026179199 hasConceptScore W2026179199C112570922 @default.
- W2026179199 hasConceptScore W2026179199C113196181 @default.
- W2026179199 hasConceptScore W2026179199C118442862 @default.
- W2026179199 hasConceptScore W2026179199C120665830 @default.
- W2026179199 hasConceptScore W2026179199C121332964 @default.
- W2026179199 hasConceptScore W2026179199C127313418 @default.
- W2026179199 hasConceptScore W2026179199C151730666 @default.
- W2026179199 hasConceptScore W2026179199C159985019 @default.
- W2026179199 hasConceptScore W2026179199C168834538 @default.
- W2026179199 hasConceptScore W2026179199C171250308 @default.
- W2026179199 hasConceptScore W2026179199C178790620 @default.
- W2026179199 hasConceptScore W2026179199C185592680 @default.
- W2026179199 hasConceptScore W2026179199C18903297 @default.
- W2026179199 hasConceptScore W2026179199C19067145 @default.
- W2026179199 hasConceptScore W2026179199C192562407 @default.
- W2026179199 hasConceptScore W2026179199C22423302 @default.
- W2026179199 hasConceptScore W2026179199C2265751 @default.
- W2026179199 hasConceptScore W2026179199C2777289219 @default.
- W2026179199 hasConceptScore W2026179199C2777527079 @default.
- W2026179199 hasConceptScore W2026179199C2816523 @default.
- W2026179199 hasConceptScore W2026179199C43617362 @default.
- W2026179199 hasConceptScore W2026179199C49040817 @default.
- W2026179199 hasConceptScore W2026179199C50774322 @default.
- W2026179199 hasConceptScore W2026179199C64297162 @default.
- W2026179199 hasConceptScore W2026179199C71987851 @default.
- W2026179199 hasConceptScore W2026179199C86803240 @default.
- W2026179199 hasConceptScore W2026179199C93106096 @default.
- W2026179199 hasLocation W20261791991 @default.
- W2026179199 hasOpenAccess W2026179199 @default.
- W2026179199 hasPrimaryLocation W20261791991 @default.
- W2026179199 hasRelatedWork W1963591696 @default.
- W2026179199 hasRelatedWork W1974402351 @default.
- W2026179199 hasRelatedWork W2050332852 @default.
- W2026179199 hasRelatedWork W2072289116 @default.
- W2026179199 hasRelatedWork W2124723979 @default.
- W2026179199 hasRelatedWork W2330155214 @default.
- W2026179199 hasRelatedWork W2897247664 @default.
- W2026179199 hasRelatedWork W2922844481 @default.
- W2026179199 hasRelatedWork W3091053487 @default.
- W2026179199 hasRelatedWork W3155554271 @default.
- W2026179199 hasRelatedWork W807804614 @default.
- W2026179199 hasRelatedWork W83353086 @default.
- W2026179199 hasRelatedWork W1955338002 @default.
- W2026179199 hasRelatedWork W2065067387 @default.
- W2026179199 hasRelatedWork W2241525830 @default.
- W2026179199 hasRelatedWork W2513103426 @default.
- W2026179199 hasRelatedWork W2761629902 @default.
- W2026179199 hasRelatedWork W2821753538 @default.
- W2026179199 hasRelatedWork W2867222824 @default.
- W2026179199 hasRelatedWork W3027608317 @default.
- W2026179199 isParatext "false" @default.
- W2026179199 isRetracted "false" @default.
- W2026179199 magId "2026179199" @default.
- W2026179199 workType "article" @default.