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- W2026302005 abstract "A simplified five-species nonequilibrium kinetic model for phosphorus diffusion in silicon is presented. The resulting system of evolution equations is of a simple reaction-diffusion form with constant diffusivities. Using first-order thermodynamic estimates for reaction rates, the phosphorus profile after a 10 min predeposition shows the expected tail. However, only when the bimolecular generation-recombination rate is significantly increased does a kink-plateau result. This suggests that recombination may be the dominant factor in producing the known nonlinearity." @default.
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- W2026302005 date "1988-11-14" @default.
- W2026302005 modified "2023-10-16" @default.
- W2026302005 title "Plateau and kink in P profiles diffused into Si: A result of strong bimolecular recombination?" @default.
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- W2026302005 doi "https://doi.org/10.1063/1.100344" @default.
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