Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026307923> ?p ?o ?g. }
- W2026307923 endingPage "015003" @default.
- W2026307923 startingPage "015003" @default.
- W2026307923 abstract "Ion energy distributions (IEDs), electron energy distributions (EEDs) and other plasma parameters of magnetron sputtering discharges driven by 13.56, 27.12 and 60 MHz sources were investigated by a retarding field energy analyzer and Langmuir probe measurements. An increase in driving frequency leads to an increase in ion energy and the evolution of IEDs from a uni-modal distribution at the 13.56 MHz discharge toward a bi-modal distribution at 27.12 MHz, and a multi-modal distribution at the 60 MHz discharge. For IEDs near the target surface, this evolution is related to the ion acceleration and the charge transfer collisions between Ar atoms and Ar+ ions in the presheath, while for IEDs at the substrate, the evolution depends on the ratio of the ion transit time across the sheath to the radio frequency period. The increase in driving frequency also leads to the evolution of EED function from a Maxwellian type at the 13.56 MHz discharge toward a bi-Maxwellian type at the 27.12 MHz discharge and a Druyvesteyn-like type at the 60 MHz discharge due to the change in the generation and loss mechanisms of electrons. In addition, increasing the driving frequency can lead to a higher electron temperature and a lower electron density. Therefore, the driving frequency becomes an effective tool to control the plasma properties of magnetron sputtering discharges." @default.
- W2026307923 created "2016-06-24" @default.
- W2026307923 creator A5008659449 @default.
- W2026307923 creator A5033247184 @default.
- W2026307923 creator A5036817334 @default.
- W2026307923 creator A5073445938 @default.
- W2026307923 creator A5084055143 @default.
- W2026307923 creator A5087583097 @default.
- W2026307923 date "2013-12-16" @default.
- W2026307923 modified "2023-10-18" @default.
- W2026307923 title "Effect of driving frequency on plasma property in radio frequency and very high frequency magnetron sputtering discharges" @default.
- W2026307923 cites W1969832738 @default.
- W2026307923 cites W1973920425 @default.
- W2026307923 cites W1976486628 @default.
- W2026307923 cites W1979620545 @default.
- W2026307923 cites W1985501520 @default.
- W2026307923 cites W1988813431 @default.
- W2026307923 cites W1998927883 @default.
- W2026307923 cites W2000036645 @default.
- W2026307923 cites W2006634883 @default.
- W2026307923 cites W2006664652 @default.
- W2026307923 cites W2011568012 @default.
- W2026307923 cites W2013845796 @default.
- W2026307923 cites W2014583063 @default.
- W2026307923 cites W2022891475 @default.
- W2026307923 cites W2023140141 @default.
- W2026307923 cites W2024112596 @default.
- W2026307923 cites W2032201768 @default.
- W2026307923 cites W2044273323 @default.
- W2026307923 cites W2044798880 @default.
- W2026307923 cites W2048015077 @default.
- W2026307923 cites W2052567455 @default.
- W2026307923 cites W2056072300 @default.
- W2026307923 cites W2058121351 @default.
- W2026307923 cites W2062710852 @default.
- W2026307923 cites W2066012741 @default.
- W2026307923 cites W2069422190 @default.
- W2026307923 cites W2069891077 @default.
- W2026307923 cites W2070671404 @default.
- W2026307923 cites W2078217871 @default.
- W2026307923 cites W2085152227 @default.
- W2026307923 cites W2085456433 @default.
- W2026307923 cites W2087013422 @default.
- W2026307923 cites W2093010801 @default.
- W2026307923 cites W2093865842 @default.
- W2026307923 cites W2094053155 @default.
- W2026307923 cites W2094522078 @default.
- W2026307923 cites W2109606373 @default.
- W2026307923 cites W2142509962 @default.
- W2026307923 cites W2154209078 @default.
- W2026307923 cites W2160248147 @default.
- W2026307923 cites W2162999431 @default.
- W2026307923 cites W2493880907 @default.
- W2026307923 cites W4250959290 @default.
- W2026307923 cites W2029621294 @default.
- W2026307923 doi "https://doi.org/10.1088/0963-0252/23/1/015003" @default.
- W2026307923 hasPublicationYear "2013" @default.
- W2026307923 type Work @default.
- W2026307923 sameAs 2026307923 @default.
- W2026307923 citedByCount "8" @default.
- W2026307923 countsByYear W20263079232014 @default.
- W2026307923 countsByYear W20263079232015 @default.
- W2026307923 countsByYear W20263079232016 @default.
- W2026307923 countsByYear W20263079232020 @default.
- W2026307923 countsByYear W20263079232021 @default.
- W2026307923 countsByYear W20263079232022 @default.
- W2026307923 crossrefType "journal-article" @default.
- W2026307923 hasAuthorship W2026307923A5008659449 @default.
- W2026307923 hasAuthorship W2026307923A5033247184 @default.
- W2026307923 hasAuthorship W2026307923A5036817334 @default.
- W2026307923 hasAuthorship W2026307923A5073445938 @default.
- W2026307923 hasAuthorship W2026307923A5084055143 @default.
- W2026307923 hasAuthorship W2026307923A5087583097 @default.
- W2026307923 hasConcept C112951337 @default.
- W2026307923 hasConcept C119599485 @default.
- W2026307923 hasConcept C120665830 @default.
- W2026307923 hasConcept C121332964 @default.
- W2026307923 hasConcept C123408415 @default.
- W2026307923 hasConcept C127413603 @default.
- W2026307923 hasConcept C145148216 @default.
- W2026307923 hasConcept C147120987 @default.
- W2026307923 hasConcept C158007255 @default.
- W2026307923 hasConcept C171250308 @default.
- W2026307923 hasConcept C176118016 @default.
- W2026307923 hasConcept C178790620 @default.
- W2026307923 hasConcept C184779094 @default.
- W2026307923 hasConcept C185592680 @default.
- W2026307923 hasConcept C19067145 @default.
- W2026307923 hasConcept C192562407 @default.
- W2026307923 hasConcept C22423302 @default.
- W2026307923 hasConcept C30475298 @default.
- W2026307923 hasConcept C43503373 @default.
- W2026307923 hasConcept C62520636 @default.
- W2026307923 hasConcept C74064498 @default.
- W2026307923 hasConcept C82706917 @default.
- W2026307923 hasConceptScore W2026307923C112951337 @default.
- W2026307923 hasConceptScore W2026307923C119599485 @default.
- W2026307923 hasConceptScore W2026307923C120665830 @default.