FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026373974> ?p ?o ?g. }

• W2026373974 endingPage "1192" @default.
• W2026373974 startingPage "1190" @default.
• W2026373974 abstract "In this paper, we examine Si and Te ion implant damage removal in GaN as a function of implantation dose, and implantation and annealing temperature. Transmission electron microscopy shows that amorphous layers, which can result from high-dose implantation, recrystallize between 800 and 1100 °C to very defective polycrystalline material. Lower-dose implants (down to 5×1013 cm−2), which are not amorphous but defective after implantation, also anneal poorly up to 1100 °C, leaving a coarse network of extended defects. Despite such disorder, a high fraction of Te is found to be substitutional in GaN both following implantation and after annealing. Furthermore, although elevated-temperature implants result in less disorder after implantation, this damage is also impossible to anneal out completely by 1100 °C. The implications of this study are that considerably higher annealing temperatures will be needed to remove damage for optimum electrical properties." @default.
• W2026373974 created "2016-06-24" @default.
• W2026373974 creator A5003746258 @default.
• W2026373974 creator A5033274212 @default.
• W2026373974 creator A5039288936 @default.
• W2026373974 creator A5050451667 @default.
• W2026373974 creator A5065245346 @default.
• W2026373974 creator A5069179193 @default.
• W2026373974 creator A5085381025 @default.
• W2026373974 date "1998-03-09" @default.
• W2026373974 modified "2023-09-27" @default.
• W2026373974 title "Annealing of ion implanted gallium nitride" @default.
• W2026373974 cites W1964749608 @default.
• W2026373974 cites W1978205197 @default.
• W2026373974 cites W2004668543 @default.
• W2026373974 cites W2034319382 @default.
• W2026373974 cites W2042916342 @default.
• W2026373974 cites W2065975700 @default.
• W2026373974 cites W2086994056 @default.
• W2026373974 cites W2088874089 @default.
• W2026373974 cites W2124190971 @default.
• W2026373974 cites W2168455584 @default.
• W2026373974 doi "https://doi.org/10.1063/1.121030" @default.
• W2026373974 hasPublicationYear "1998" @default.
• W2026373974 type Work @default.
• W2026373974 sameAs 2026373974 @default.
• W2026373974 citedByCount "75" @default.
• W2026373974 countsByYear W20263739742012 @default.
• W2026373974 countsByYear W20263739742013 @default.
• W2026373974 countsByYear W20263739742015 @default.
• W2026373974 countsByYear W20263739742016 @default.
• W2026373974 countsByYear W20263739742020 @default.
• W2026373974 countsByYear W20263739742023 @default.
• W2026373974 crossrefType "journal-article" @default.
• W2026373974 hasAuthorship W2026373974A5003746258 @default.
• W2026373974 hasAuthorship W2026373974A5033274212 @default.
• W2026373974 hasAuthorship W2026373974A5039288936 @default.
• W2026373974 hasAuthorship W2026373974A5050451667 @default.
• W2026373974 hasAuthorship W2026373974A5065245346 @default.
• W2026373974 hasAuthorship W2026373974A5069179193 @default.
• W2026373974 hasAuthorship W2026373974A5085381025 @default.
• W2026373974 hasBestOaLocation W20263739741 @default.
• W2026373974 hasConcept C113196181 @default.
• W2026373974 hasConcept C137637335 @default.
• W2026373974 hasConcept C145148216 @default.
• W2026373974 hasConcept C146088050 @default.
• W2026373974 hasConcept C159985019 @default.
• W2026373974 hasConcept C171250308 @default.
• W2026373974 hasConcept C178790620 @default.
• W2026373974 hasConcept C185592680 @default.
• W2026373974 hasConcept C189278905 @default.
• W2026373974 hasConcept C191897082 @default.
• W2026373974 hasConcept C192562407 @default.
• W2026373974 hasConcept C2777855556 @default.
• W2026373974 hasConcept C2778871202 @default.
• W2026373974 hasConcept C2779227376 @default.
• W2026373974 hasConcept C41823505 @default.
• W2026373974 hasConcept C43617362 @default.
• W2026373974 hasConcept C49040817 @default.
• W2026373974 hasConcept C550372918 @default.
• W2026373974 hasConcept C56052488 @default.
• W2026373974 hasConcept C8010536 @default.
• W2026373974 hasConceptScore W2026373974C113196181 @default.
• W2026373974 hasConceptScore W2026373974C137637335 @default.
• W2026373974 hasConceptScore W2026373974C145148216 @default.
• W2026373974 hasConceptScore W2026373974C146088050 @default.
• W2026373974 hasConceptScore W2026373974C159985019 @default.
• W2026373974 hasConceptScore W2026373974C171250308 @default.
• W2026373974 hasConceptScore W2026373974C178790620 @default.
• W2026373974 hasConceptScore W2026373974C185592680 @default.
• W2026373974 hasConceptScore W2026373974C189278905 @default.
• W2026373974 hasConceptScore W2026373974C191897082 @default.
• W2026373974 hasConceptScore W2026373974C192562407 @default.
• W2026373974 hasConceptScore W2026373974C2777855556 @default.
• W2026373974 hasConceptScore W2026373974C2778871202 @default.
• W2026373974 hasConceptScore W2026373974C2779227376 @default.
• W2026373974 hasConceptScore W2026373974C41823505 @default.
• W2026373974 hasConceptScore W2026373974C43617362 @default.
• W2026373974 hasConceptScore W2026373974C49040817 @default.
• W2026373974 hasConceptScore W2026373974C550372918 @default.
• W2026373974 hasConceptScore W2026373974C56052488 @default.
• W2026373974 hasConceptScore W2026373974C8010536 @default.
• W2026373974 hasIssue "10" @default.
• W2026373974 hasLocation W20263739741 @default.
• W2026373974 hasOpenAccess W2026373974 @default.
• W2026373974 hasPrimaryLocation W20263739741 @default.
• W2026373974 hasRelatedWork W1988337966 @default.
• W2026373974 hasRelatedWork W2005181459 @default.
• W2026373974 hasRelatedWork W2067847322 @default.
• W2026373974 hasRelatedWork W2087453303 @default.
• W2026373974 hasRelatedWork W2096011054 @default.
• W2026373974 hasRelatedWork W2123170654 @default.
• W2026373974 hasRelatedWork W218031315 @default.
• W2026373974 hasRelatedWork W2433290148 @default.
• W2026373974 hasRelatedWork W4320811442 @default.
• W2026373974 hasRelatedWork W2151084480 @default.
• W2026373974 hasVolume "72" @default.
• W2026373974 isParatext "false" @default.

• next