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- W2026483211 abstract "Atomic layer deposition(ALD)를 이용하여 Si와 soda lime glass 기판 위에 ZnO 박막을 증착하였다. 기판의 온도는 비교적 저온인 <TEX>$130^{circ}C{sim}150^{circ}C$</TEX>를 채택하였다. 증착결과 단위 cycle 당 <TEX>$2.72{AA}$</TEX>이 증착되어 균일한 박막이 증착되었음이 확인되었다. 증착된 박막의 결정성을 X-ray diffraction(XRD)으로 조사해본 결과 비교적 저온에서도 (100)과 (101)방향의 성장이 우세하였다. 또 Auger electron spectroscopy(AES)로 분석해본 결과 불순물이 없는 순도 높은 박막이 성장되었음을 알 수 있었다. ZnO thin films were deposited on a Si wafer and a soda lime glass using atomic layer deposition(ALD). The substrate temperature were between <TEX>$130^{circ}C{sim}150^{circ}C$</TEX>. The deposition rate of the ZnO film was measured to be <TEX>$2.72{AA}$</TEX> per cycle. The films were analyzed using field emission scanning electron microscopy(FESEM), X-ray diffractometer(XRD), and Auger electron spectroscopy(AES). Impurity-free ZnO thin films were obtained and the crystallinity was found to be dependant upon the substrate temperature." @default.
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- W2026483211 date "2007-05-30" @default.
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- W2026483211 title "ZnO thin film deposition at low temperature using ALD" @default.
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- W2026483211 doi "https://doi.org/10.5757/jkvs.2007.16.3.205" @default.
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