Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026496693> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2026496693 abstract "Step and scan projection printers overcome the most stringent restriction of step and repeat cameras: the trade off between the resolving power of the lithographic lens and its image field. In a scanning projection printer the reticle and wafer both have to be moved with a constant velocity, keeping their speed ratio equal to the reduction of the lens. The length of the circuit is now reticle limited. An additional extension consists in stitching several lanes together in order to lengthen the dimension perpendicular to the scan direction. However, lens aberrations, mechanical vibrations as well as synchronization errors of the stages, deteriorate the image transfer. The aim of this article is the classification and treatment of these scan- induced deteriorations. So-called contrast transfer curves are calculated offering the possibility of gaining quantitative values of the disturbance amplitudes for permissible contrast drops. Additionally, exposure-defocus (ED) trees are constructed as an evaluation criterion of the scan-induced image degradation." @default.
- W2026496693 created "2016-06-24" @default.
- W2026496693 creator A5002912646 @default.
- W2026496693 creator A5016222719 @default.
- W2026496693 creator A5051027101 @default.
- W2026496693 creator A5051544964 @default.
- W2026496693 date "1994-05-17" @default.
- W2026496693 modified "2023-09-23" @default.
- W2026496693 title "<title>Simulations on step-and-scan optical lithography</title>" @default.
- W2026496693 doi "https://doi.org/10.1117/12.175488" @default.
- W2026496693 hasPublicationYear "1994" @default.
- W2026496693 type Work @default.
- W2026496693 sameAs 2026496693 @default.
- W2026496693 citedByCount "7" @default.
- W2026496693 countsByYear W20264966932015 @default.
- W2026496693 countsByYear W20264966932016 @default.
- W2026496693 countsByYear W20264966932019 @default.
- W2026496693 countsByYear W20264966932023 @default.
- W2026496693 crossrefType "proceedings-article" @default.
- W2026496693 hasAuthorship W2026496693A5002912646 @default.
- W2026496693 hasAuthorship W2026496693A5016222719 @default.
- W2026496693 hasAuthorship W2026496693A5051027101 @default.
- W2026496693 hasAuthorship W2026496693A5051544964 @default.
- W2026496693 hasConcept C11413529 @default.
- W2026496693 hasConcept C115961682 @default.
- W2026496693 hasConcept C120665830 @default.
- W2026496693 hasConcept C121332964 @default.
- W2026496693 hasConcept C146617872 @default.
- W2026496693 hasConcept C14737013 @default.
- W2026496693 hasConcept C15336307 @default.
- W2026496693 hasConcept C154945302 @default.
- W2026496693 hasConcept C159985019 @default.
- W2026496693 hasConcept C160671074 @default.
- W2026496693 hasConcept C175231954 @default.
- W2026496693 hasConcept C192562407 @default.
- W2026496693 hasConcept C204223013 @default.
- W2026496693 hasConcept C24890656 @default.
- W2026496693 hasConcept C2776429412 @default.
- W2026496693 hasConcept C2779227376 @default.
- W2026496693 hasConcept C29081049 @default.
- W2026496693 hasConcept C31972630 @default.
- W2026496693 hasConcept C41008148 @default.
- W2026496693 hasConcept C49040817 @default.
- W2026496693 hasConcept C53524968 @default.
- W2026496693 hasConcept C57493831 @default.
- W2026496693 hasConcept C78336883 @default.
- W2026496693 hasConceptScore W2026496693C11413529 @default.
- W2026496693 hasConceptScore W2026496693C115961682 @default.
- W2026496693 hasConceptScore W2026496693C120665830 @default.
- W2026496693 hasConceptScore W2026496693C121332964 @default.
- W2026496693 hasConceptScore W2026496693C146617872 @default.
- W2026496693 hasConceptScore W2026496693C14737013 @default.
- W2026496693 hasConceptScore W2026496693C15336307 @default.
- W2026496693 hasConceptScore W2026496693C154945302 @default.
- W2026496693 hasConceptScore W2026496693C159985019 @default.
- W2026496693 hasConceptScore W2026496693C160671074 @default.
- W2026496693 hasConceptScore W2026496693C175231954 @default.
- W2026496693 hasConceptScore W2026496693C192562407 @default.
- W2026496693 hasConceptScore W2026496693C204223013 @default.
- W2026496693 hasConceptScore W2026496693C24890656 @default.
- W2026496693 hasConceptScore W2026496693C2776429412 @default.
- W2026496693 hasConceptScore W2026496693C2779227376 @default.
- W2026496693 hasConceptScore W2026496693C29081049 @default.
- W2026496693 hasConceptScore W2026496693C31972630 @default.
- W2026496693 hasConceptScore W2026496693C41008148 @default.
- W2026496693 hasConceptScore W2026496693C49040817 @default.
- W2026496693 hasConceptScore W2026496693C53524968 @default.
- W2026496693 hasConceptScore W2026496693C57493831 @default.
- W2026496693 hasConceptScore W2026496693C78336883 @default.
- W2026496693 hasLocation W20264966931 @default.
- W2026496693 hasOpenAccess W2026496693 @default.
- W2026496693 hasPrimaryLocation W20264966931 @default.
- W2026496693 hasRelatedWork W1544888428 @default.
- W2026496693 hasRelatedWork W2023212528 @default.
- W2026496693 hasRelatedWork W2026496693 @default.
- W2026496693 hasRelatedWork W2034972341 @default.
- W2026496693 hasRelatedWork W2079787243 @default.
- W2026496693 hasRelatedWork W2091483213 @default.
- W2026496693 hasRelatedWork W2477682586 @default.
- W2026496693 hasRelatedWork W2506049589 @default.
- W2026496693 hasRelatedWork W2905778683 @default.
- W2026496693 hasRelatedWork W4321139331 @default.
- W2026496693 isParatext "false" @default.
- W2026496693 isRetracted "false" @default.
- W2026496693 magId "2026496693" @default.
- W2026496693 workType "article" @default.