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• W2026518641 abstract "Aluminium nitride (AlN) reactively sputter deposited from an aluminium target is an interesting compound material dueto its CMOS compatible fabrication process and its piezoelectric properties. The crystal structure obtained duringsputtering is a very importance criterion to obtain a good piezoelectric performance. To demonstrate this, we focused ourinvestigations on two types of films. The first type shows a good c- axis orientation with round grain geometry. Thesecond type is (101) oriented having a triangular grain shape. For measuring the out-of-plane displacements for dijdetermination, a MSV 400 Polytec scanning laser Doppler vibrometer was used. To obtain the piezoelectric constants d33and d31 a fitting procedure between experimental and theoretical predicted results is used. Effective values for d33 and d31in c-axis oriented films are about 3.0 pm/V and -1.0 pm/V, respectively. By contrast, films with (101) orientation show alower effective longitudinal piezoelectric coefficients, consistent with this different orientation.Finally, both types of AlN layers were deposited on 640 μm long micro-cantilevers. The average displacement of thefirst mode on the vertical axis was about 12 nm for the film with good c -axis orientation and 0.3 nm for that with (101)-orientation when applying the same excitation." @default.
• W2026518641 created "2016-06-24" @default.
• W2026518641 creator A5006249454 @default.
• W2026518641 creator A5019870494 @default.
• W2026518641 creator A5027087490 @default.
• W2026518641 creator A5035673143 @default.
• W2026518641 creator A5054507364 @default.
• W2026518641 creator A5064576504 @default.
• W2026518641 creator A5084594213 @default.
• W2026518641 creator A5090186090 @default.
• W2026518641 date "2009-05-20" @default.
• W2026518641 modified "2023-09-23" @default.
• W2026518641 title "Comparison between AlN thin films with different crystal orientations for MEMS applications" @default.
• W2026518641 cites W1971353140 @default.
• W2026518641 cites W1995844691 @default.
• W2026518641 cites W2028803173 @default.
• W2026518641 cites W2046104316 @default.
• W2026518641 cites W2046467719 @default.
• W2026518641 cites W2056798887 @default.
• W2026518641 cites W2060964422 @default.
• W2026518641 cites W2062813441 @default.
• W2026518641 cites W2074143600 @default.
• W2026518641 cites W2091966810 @default.
• W2026518641 cites W2095382286 @default.
• W2026518641 cites W2159138826 @default.
• W2026518641 cites W2172124160 @default.
• W2026518641 cites W3151711189 @default.
• W2026518641 doi "https://doi.org/10.1117/12.821858" @default.
• W2026518641 hasPublicationYear "2009" @default.
• W2026518641 type Work @default.
• W2026518641 sameAs 2026518641 @default.
• W2026518641 citedByCount "1" @default.
• W2026518641 crossrefType "proceedings-article" @default.
• W2026518641 hasAuthorship W2026518641A5006249454 @default.
• W2026518641 hasAuthorship W2026518641A5019870494 @default.
• W2026518641 hasAuthorship W2026518641A5027087490 @default.
• W2026518641 hasAuthorship W2026518641A5035673143 @default.
• W2026518641 hasAuthorship W2026518641A5054507364 @default.
• W2026518641 hasAuthorship W2026518641A5064576504 @default.
• W2026518641 hasAuthorship W2026518641A5084594213 @default.
• W2026518641 hasAuthorship W2026518641A5090186090 @default.
• W2026518641 hasConcept C100082104 @default.
• W2026518641 hasConcept C136525101 @default.
• W2026518641 hasConcept C142724271 @default.
• W2026518641 hasConcept C159985019 @default.
• W2026518641 hasConcept C171250308 @default.
• W2026518641 hasConcept C19067145 @default.
• W2026518641 hasConcept C192562407 @default.
• W2026518641 hasConcept C194760766 @default.
• W2026518641 hasConcept C199360897 @default.
• W2026518641 hasConcept C204787440 @default.
• W2026518641 hasConcept C22423302 @default.
• W2026518641 hasConcept C2779227376 @default.
• W2026518641 hasConcept C2780162792 @default.
• W2026518641 hasConcept C2781285689 @default.
• W2026518641 hasConcept C37977207 @default.
• W2026518641 hasConcept C41008148 @default.
• W2026518641 hasConcept C49040817 @default.
• W2026518641 hasConcept C513153333 @default.
• W2026518641 hasConcept C71924100 @default.
• W2026518641 hasConceptScore W2026518641C100082104 @default.
• W2026518641 hasConceptScore W2026518641C136525101 @default.
• W2026518641 hasConceptScore W2026518641C142724271 @default.
• W2026518641 hasConceptScore W2026518641C159985019 @default.
• W2026518641 hasConceptScore W2026518641C171250308 @default.
• W2026518641 hasConceptScore W2026518641C19067145 @default.
• W2026518641 hasConceptScore W2026518641C192562407 @default.
• W2026518641 hasConceptScore W2026518641C194760766 @default.
• W2026518641 hasConceptScore W2026518641C199360897 @default.
• W2026518641 hasConceptScore W2026518641C204787440 @default.
• W2026518641 hasConceptScore W2026518641C22423302 @default.
• W2026518641 hasConceptScore W2026518641C2779227376 @default.
• W2026518641 hasConceptScore W2026518641C2780162792 @default.
• W2026518641 hasConceptScore W2026518641C2781285689 @default.
• W2026518641 hasConceptScore W2026518641C37977207 @default.
• W2026518641 hasConceptScore W2026518641C41008148 @default.
• W2026518641 hasConceptScore W2026518641C49040817 @default.
• W2026518641 hasConceptScore W2026518641C513153333 @default.
• W2026518641 hasConceptScore W2026518641C71924100 @default.
• W2026518641 hasLocation W20265186411 @default.
• W2026518641 hasOpenAccess W2026518641 @default.
• W2026518641 hasPrimaryLocation W20265186411 @default.
• W2026518641 hasRelatedWork W1597107841 @default.
• W2026518641 hasRelatedWork W1651307832 @default.
• W2026518641 hasRelatedWork W1963773379 @default.
• W2026518641 hasRelatedWork W1980185276 @default.
• W2026518641 hasRelatedWork W1993059013 @default.
• W2026518641 hasRelatedWork W2014648878 @default.
• W2026518641 hasRelatedWork W2027720593 @default.
• W2026518641 hasRelatedWork W2045853074 @default.
• W2026518641 hasRelatedWork W2051696141 @default.
• W2026518641 hasRelatedWork W2062209139 @default.
• W2026518641 hasRelatedWork W2069200555 @default.
• W2026518641 hasRelatedWork W2070041852 @default.
• W2026518641 hasRelatedWork W2113986844 @default.
• W2026518641 hasRelatedWork W2126096907 @default.
• W2026518641 hasRelatedWork W2126771168 @default.
• W2026518641 hasRelatedWork W2143107415 @default.
• W2026518641 hasRelatedWork W2156748038 @default.
• W2026518641 hasRelatedWork W278964729 @default.

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