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- W2026541275 endingPage "725" @default.
- W2026541275 startingPage "718" @default.
- W2026541275 abstract "The oxidation kinetics during sputtering of an Al target in a planar magnetron have been studied by accurate measurement of the total pressure produced by argon/oxygen mixtures. When a 5×8-in. target is rf sputtered at 500 W with a fixed argon flow, the pressure is constant at 4.6 mTorr until the oxygen flow rate is increased to 2.1 cm3/min. At this critical flow, the total pressure increases to 7.85 mTorr in 100 min and the time dependence is explained by a parabolic oxidation rate. The equilibrium oxide thickness is about 100 nm and has been measured by determining the time necessary to cause a sudden increase from 180 to 290 V in self-bias voltage. When the target was oxidized, Al2O3 films were deposited at 3 nm/min, whereas Al was deposited in an argon discharge at 70 nm/min. The ratio in sputtering rates of Al and Al2O is a factor of 2 greater than predicted from calculated yield values. Before target oxidation, oxygen added to the system is gettered by the film until, at values just below the critical value, Auger analysis shows the films have a composition AlOx where 1<x<1.5." @default.
- W2026541275 created "2016-06-24" @default.
- W2026541275 creator A5016188405 @default.
- W2026541275 creator A5076220886 @default.
- W2026541275 date "1980-01-01" @default.
- W2026541275 modified "2023-10-16" @default.
- W2026541275 title "Oxidation of an aluminum magnetron sputtering target in Ar/O2 mixtures" @default.
- W2026541275 cites W1963728900 @default.
- W2026541275 cites W1968225035 @default.
- W2026541275 cites W1977304781 @default.
- W2026541275 cites W1981125651 @default.
- W2026541275 cites W1990724678 @default.
- W2026541275 cites W2005993996 @default.
- W2026541275 cites W2011128697 @default.
- W2026541275 cites W2028436237 @default.
- W2026541275 cites W2032810988 @default.
- W2026541275 cites W2072401151 @default.
- W2026541275 cites W2086382035 @default.
- W2026541275 cites W2092763626 @default.
- W2026541275 cites W2148325111 @default.
- W2026541275 cites W2613924379 @default.
- W2026541275 cites W4230053467 @default.
- W2026541275 doi "https://doi.org/10.1063/1.327332" @default.
- W2026541275 hasPublicationYear "1980" @default.
- W2026541275 type Work @default.
- W2026541275 sameAs 2026541275 @default.
- W2026541275 citedByCount "56" @default.
- W2026541275 countsByYear W20265412752012 @default.
- W2026541275 countsByYear W20265412752013 @default.
- W2026541275 countsByYear W20265412752014 @default.
- W2026541275 countsByYear W20265412752017 @default.
- W2026541275 countsByYear W20265412752020 @default.
- W2026541275 countsByYear W20265412752021 @default.
- W2026541275 crossrefType "journal-article" @default.
- W2026541275 hasAuthorship W2026541275A5016188405 @default.
- W2026541275 hasAuthorship W2026541275A5076220886 @default.
- W2026541275 hasConcept C113196181 @default.
- W2026541275 hasConcept C121332964 @default.
- W2026541275 hasConcept C123408415 @default.
- W2026541275 hasConcept C171250308 @default.
- W2026541275 hasConcept C172120300 @default.
- W2026541275 hasConcept C178790620 @default.
- W2026541275 hasConcept C185592680 @default.
- W2026541275 hasConcept C19067145 @default.
- W2026541275 hasConcept C191897082 @default.
- W2026541275 hasConcept C192562407 @default.
- W2026541275 hasConcept C22423302 @default.
- W2026541275 hasConcept C30646810 @default.
- W2026541275 hasConcept C43617362 @default.
- W2026541275 hasConcept C513153333 @default.
- W2026541275 hasConcept C540031477 @default.
- W2026541275 hasConcept C547737533 @default.
- W2026541275 hasConcept C61427134 @default.
- W2026541275 hasConcept C97355855 @default.
- W2026541275 hasConceptScore W2026541275C113196181 @default.
- W2026541275 hasConceptScore W2026541275C121332964 @default.
- W2026541275 hasConceptScore W2026541275C123408415 @default.
- W2026541275 hasConceptScore W2026541275C171250308 @default.
- W2026541275 hasConceptScore W2026541275C172120300 @default.
- W2026541275 hasConceptScore W2026541275C178790620 @default.
- W2026541275 hasConceptScore W2026541275C185592680 @default.
- W2026541275 hasConceptScore W2026541275C19067145 @default.
- W2026541275 hasConceptScore W2026541275C191897082 @default.
- W2026541275 hasConceptScore W2026541275C192562407 @default.
- W2026541275 hasConceptScore W2026541275C22423302 @default.
- W2026541275 hasConceptScore W2026541275C30646810 @default.
- W2026541275 hasConceptScore W2026541275C43617362 @default.
- W2026541275 hasConceptScore W2026541275C513153333 @default.
- W2026541275 hasConceptScore W2026541275C540031477 @default.
- W2026541275 hasConceptScore W2026541275C547737533 @default.
- W2026541275 hasConceptScore W2026541275C61427134 @default.
- W2026541275 hasConceptScore W2026541275C97355855 @default.
- W2026541275 hasIssue "1" @default.
- W2026541275 hasLocation W20265412751 @default.
- W2026541275 hasOpenAccess W2026541275 @default.
- W2026541275 hasPrimaryLocation W20265412751 @default.
- W2026541275 hasRelatedWork W1968373997 @default.
- W2026541275 hasRelatedWork W1972938885 @default.
- W2026541275 hasRelatedWork W1978106902 @default.
- W2026541275 hasRelatedWork W2019028715 @default.
- W2026541275 hasRelatedWork W2079462963 @default.
- W2026541275 hasRelatedWork W2085953416 @default.
- W2026541275 hasRelatedWork W2332420640 @default.
- W2026541275 hasRelatedWork W2384143870 @default.
- W2026541275 hasRelatedWork W2476687745 @default.
- W2026541275 hasRelatedWork W301690088 @default.
- W2026541275 hasVolume "51" @default.
- W2026541275 isParatext "false" @default.
- W2026541275 isRetracted "false" @default.
- W2026541275 magId "2026541275" @default.
- W2026541275 workType "article" @default.