Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026546021> ?p ?o ?g. }
- W2026546021 endingPage "D29" @default.
- W2026546021 startingPage "D29" @default.
- W2026546021 abstract "Thin ( to 65 nm) films of amorphous cobalt–phosphorus alloys are grown on by chemical vapor deposition from dicobaltoctacarbonyl and trimethylphosphine at 250, 300, and . Films incorporate C as an impurity, as both carbidic and graphitic C; Co and P, however, do not form phosphide compounds, as indicated by X-ray photoelectron spectroscopy analysis. Both C and P influence film microstructure, and neither significantly negatively impacts resistivity. Reduced deposition temperatures minimize the amount of C incorporated but do not further lower resistivity. Regardless of the deposition temperature, films show good thermal stability, maintaining their amorphous microstructures after a 3 h anneal at . The anneal serves to reduce film resistivity due in part to the decomposition of cobalt carbides and a corresponding increase in the amount of metallic Co." @default.
- W2026546021 created "2016-06-24" @default.
- W2026546021 creator A5071426093 @default.
- W2026546021 creator A5091584349 @default.
- W2026546021 date "2010-01-01" @default.
- W2026546021 modified "2023-09-23" @default.
- W2026546021 title "Effect of Phosphorus and Carbon Incorporation in Amorphous Cobalt Films Prepared by Chemical Vapor Deposition" @default.
- W2026546021 cites W1597355861 @default.
- W2026546021 cites W170895204 @default.
- W2026546021 cites W1771067355 @default.
- W2026546021 cites W1771987095 @default.
- W2026546021 cites W1784525709 @default.
- W2026546021 cites W1965842634 @default.
- W2026546021 cites W1968039926 @default.
- W2026546021 cites W1971076736 @default.
- W2026546021 cites W1972842779 @default.
- W2026546021 cites W1975484705 @default.
- W2026546021 cites W1977411898 @default.
- W2026546021 cites W1978724167 @default.
- W2026546021 cites W1981828999 @default.
- W2026546021 cites W1984882937 @default.
- W2026546021 cites W1985514371 @default.
- W2026546021 cites W1986773936 @default.
- W2026546021 cites W1990585077 @default.
- W2026546021 cites W1998344357 @default.
- W2026546021 cites W2001227890 @default.
- W2026546021 cites W2001957916 @default.
- W2026546021 cites W2005259251 @default.
- W2026546021 cites W2005508921 @default.
- W2026546021 cites W2006555212 @default.
- W2026546021 cites W2007716506 @default.
- W2026546021 cites W2009729193 @default.
- W2026546021 cites W2012702990 @default.
- W2026546021 cites W2012997219 @default.
- W2026546021 cites W2013139546 @default.
- W2026546021 cites W2018098357 @default.
- W2026546021 cites W2018903988 @default.
- W2026546021 cites W2019612118 @default.
- W2026546021 cites W2025746040 @default.
- W2026546021 cites W2032186106 @default.
- W2026546021 cites W2037141697 @default.
- W2026546021 cites W2045298557 @default.
- W2026546021 cites W2046384069 @default.
- W2026546021 cites W2048937913 @default.
- W2026546021 cites W2049550886 @default.
- W2026546021 cites W2050308948 @default.
- W2026546021 cites W2054295299 @default.
- W2026546021 cites W2055459990 @default.
- W2026546021 cites W2055876373 @default.
- W2026546021 cites W2055936608 @default.
- W2026546021 cites W2057181801 @default.
- W2026546021 cites W2062920134 @default.
- W2026546021 cites W2066213748 @default.
- W2026546021 cites W2068854787 @default.
- W2026546021 cites W2069471268 @default.
- W2026546021 cites W2071504968 @default.
- W2026546021 cites W2072428375 @default.
- W2026546021 cites W2072698047 @default.
- W2026546021 cites W2073596660 @default.
- W2026546021 cites W2073620801 @default.
- W2026546021 cites W2073975915 @default.
- W2026546021 cites W2079325034 @default.
- W2026546021 cites W2080979506 @default.
- W2026546021 cites W2083116112 @default.
- W2026546021 cites W2083461900 @default.
- W2026546021 cites W2084619167 @default.
- W2026546021 cites W2090510284 @default.
- W2026546021 cites W2094777764 @default.
- W2026546021 cites W2103838121 @default.
- W2026546021 cites W2106688300 @default.
- W2026546021 cites W2116380636 @default.
- W2026546021 cites W2121216335 @default.
- W2026546021 cites W2127991357 @default.
- W2026546021 cites W2133017324 @default.
- W2026546021 cites W2133331489 @default.
- W2026546021 cites W2138414220 @default.
- W2026546021 cites W2161203899 @default.
- W2026546021 cites W2168876232 @default.
- W2026546021 cites W2326660250 @default.
- W2026546021 cites W3022476158 @default.
- W2026546021 cites W3209151084 @default.
- W2026546021 cites W4249767684 @default.
- W2026546021 cites W1989476502 @default.
- W2026546021 doi "https://doi.org/10.1149/1.3251283" @default.
- W2026546021 hasPublicationYear "2010" @default.
- W2026546021 type Work @default.
- W2026546021 sameAs 2026546021 @default.
- W2026546021 citedByCount "18" @default.
- W2026546021 countsByYear W20265460212012 @default.
- W2026546021 countsByYear W20265460212013 @default.
- W2026546021 countsByYear W20265460212014 @default.
- W2026546021 countsByYear W20265460212015 @default.
- W2026546021 countsByYear W20265460212016 @default.
- W2026546021 countsByYear W20265460212017 @default.
- W2026546021 countsByYear W20265460212020 @default.
- W2026546021 countsByYear W20265460212022 @default.
- W2026546021 crossrefType "journal-article" @default.
- W2026546021 hasAuthorship W2026546021A5071426093 @default.