Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026615058> ?p ?o ?g. }
- W2026615058 endingPage "305203" @default.
- W2026615058 startingPage "305203" @default.
- W2026615058 abstract "Abstract Both geometrical and electrical asymmetry effects in capacitive argon discharges are investigated using a two-dimensional particle-in-cell coupled with Monte Carlo collision model. When changing the ratio of the top and bottom electrode surface areas and the phase shift between the two applied harmonics, the induced self-bias was found to develop separately. By adjusting the ratio between the high and low harmonic amplitudes, the electrical asymmetry effect at a fixed phase shift can be substantially optimized. However, the self-bias caused by the geometrical asymmetry hardly changed. Moreover, the separate control of these two asymmetry effects can also be demonstrated from their power absorption profiles. Both the axial and radial plasma density distributions can be modulated by the electrical asymmetry effect." @default.
- W2026615058 created "2016-06-24" @default.
- W2026615058 creator A5023787969 @default.
- W2026615058 creator A5027363222 @default.
- W2026615058 creator A5066088212 @default.
- W2026615058 creator A5089734168 @default.
- W2026615058 date "2012-07-10" @default.
- W2026615058 modified "2023-09-24" @default.
- W2026615058 title "Separate control between geometrical and electrical asymmetry effects in capacitively coupled plasmas" @default.
- W2026615058 cites W1963643954 @default.
- W2026615058 cites W1966586625 @default.
- W2026615058 cites W1986816490 @default.
- W2026615058 cites W1993962105 @default.
- W2026615058 cites W1997918394 @default.
- W2026615058 cites W2000172671 @default.
- W2026615058 cites W2006634883 @default.
- W2026615058 cites W2008464274 @default.
- W2026615058 cites W2010839848 @default.
- W2026615058 cites W2014179001 @default.
- W2026615058 cites W2016845264 @default.
- W2026615058 cites W2017981825 @default.
- W2026615058 cites W2020045108 @default.
- W2026615058 cites W2022650975 @default.
- W2026615058 cites W2031201399 @default.
- W2026615058 cites W2031799201 @default.
- W2026615058 cites W2035215621 @default.
- W2026615058 cites W2044798880 @default.
- W2026615058 cites W2060239740 @default.
- W2026615058 cites W2060600644 @default.
- W2026615058 cites W2061139552 @default.
- W2026615058 cites W2064536814 @default.
- W2026615058 cites W2064932234 @default.
- W2026615058 cites W2067013455 @default.
- W2026615058 cites W2090851454 @default.
- W2026615058 cites W2104062774 @default.
- W2026615058 cites W2106997269 @default.
- W2026615058 cites W2123761964 @default.
- W2026615058 cites W2132508913 @default.
- W2026615058 cites W2169060080 @default.
- W2026615058 cites W2171206964 @default.
- W2026615058 cites W2171411425 @default.
- W2026615058 cites W2493880907 @default.
- W2026615058 cites W3099485127 @default.
- W2026615058 cites W4246994895 @default.
- W2026615058 doi "https://doi.org/10.1088/0022-3727/45/30/305203" @default.
- W2026615058 hasPublicationYear "2012" @default.
- W2026615058 type Work @default.
- W2026615058 sameAs 2026615058 @default.
- W2026615058 citedByCount "23" @default.
- W2026615058 countsByYear W20266150582012 @default.
- W2026615058 countsByYear W20266150582013 @default.
- W2026615058 countsByYear W20266150582014 @default.
- W2026615058 countsByYear W20266150582015 @default.
- W2026615058 countsByYear W20266150582017 @default.
- W2026615058 countsByYear W20266150582018 @default.
- W2026615058 countsByYear W20266150582020 @default.
- W2026615058 countsByYear W20266150582021 @default.
- W2026615058 countsByYear W20266150582022 @default.
- W2026615058 countsByYear W20266150582023 @default.
- W2026615058 crossrefType "journal-article" @default.
- W2026615058 hasAuthorship W2026615058A5023787969 @default.
- W2026615058 hasAuthorship W2026615058A5027363222 @default.
- W2026615058 hasAuthorship W2026615058A5066088212 @default.
- W2026615058 hasAuthorship W2026615058A5089734168 @default.
- W2026615058 hasConcept C119599485 @default.
- W2026615058 hasConcept C120665830 @default.
- W2026615058 hasConcept C121332964 @default.
- W2026615058 hasConcept C127413603 @default.
- W2026615058 hasConcept C165801399 @default.
- W2026615058 hasConcept C180205008 @default.
- W2026615058 hasConcept C184779094 @default.
- W2026615058 hasConcept C185592680 @default.
- W2026615058 hasConcept C188414643 @default.
- W2026615058 hasConcept C192562407 @default.
- W2026615058 hasConcept C206755178 @default.
- W2026615058 hasConcept C30475298 @default.
- W2026615058 hasConcept C38976095 @default.
- W2026615058 hasConcept C44280652 @default.
- W2026615058 hasConcept C62520636 @default.
- W2026615058 hasConcept C68687820 @default.
- W2026615058 hasConcept C82706917 @default.
- W2026615058 hasConcept C95974651 @default.
- W2026615058 hasConceptScore W2026615058C119599485 @default.
- W2026615058 hasConceptScore W2026615058C120665830 @default.
- W2026615058 hasConceptScore W2026615058C121332964 @default.
- W2026615058 hasConceptScore W2026615058C127413603 @default.
- W2026615058 hasConceptScore W2026615058C165801399 @default.
- W2026615058 hasConceptScore W2026615058C180205008 @default.
- W2026615058 hasConceptScore W2026615058C184779094 @default.
- W2026615058 hasConceptScore W2026615058C185592680 @default.
- W2026615058 hasConceptScore W2026615058C188414643 @default.
- W2026615058 hasConceptScore W2026615058C192562407 @default.
- W2026615058 hasConceptScore W2026615058C206755178 @default.
- W2026615058 hasConceptScore W2026615058C30475298 @default.
- W2026615058 hasConceptScore W2026615058C38976095 @default.
- W2026615058 hasConceptScore W2026615058C44280652 @default.
- W2026615058 hasConceptScore W2026615058C62520636 @default.
- W2026615058 hasConceptScore W2026615058C68687820 @default.