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- W2026692085 endingPage "151" @default.
- W2026692085 startingPage "147" @default.
- W2026692085 abstract "Titanium nitride (TiN) thin films were deposited on to unheated silicon (100) and stainless steel substrates by home-made direct current (DC) reactive magnetron sputtering method at a deposition of 60 min in an Ar-N 2 gas mixture. The effects of sputtering power on structure and microstructure of these films have been studied. The films were analyzed by X-ray diffraction (XRD), Atomic Force Microscope (AFM) and Field-Emission Scanning Electron Microscope (FE-SEM). The films colors were influenced by sputtering parameter which altered from green purple to light gold and dark gold, respectively. By XRD, the polycrystalline structure of the as-deposited films was face center cubic (fcc) of TiN structure with (111), (200), (220), and (311), planes. The increasing of sputtering power transformed film from amorphous phase to crystal phase with crystal size were enhanced from 21.9 nm to 39.8 nm. The AFM scans revealed that sputtering power significantly affected surface morphologies and thicknesses of the TiN films. With increase in sputtering power, the roughness and films thickness were increased from 0.5 nm to 25.1 nm and 331 nm to 1113 μm, respectively. The microstructure combined with cross-section analysis FE-SEM revealed that the grain refinement with columnar structure were obtained for the film deposited at sputtering power of 270 W." @default.
- W2026692085 created "2016-06-24" @default.
- W2026692085 creator A5031239537 @default.
- W2026692085 creator A5047987472 @default.
- W2026692085 creator A5060878743 @default.
- W2026692085 date "2014-05-01" @default.
- W2026692085 modified "2023-09-26" @default.
- W2026692085 title "Structure and Microstructure of Binary Nitride TiN Thin Films Deposited by DC Reactive Sputtering" @default.
- W2026692085 cites W1966001162 @default.
- W2026692085 cites W1971678710 @default.
- W2026692085 cites W1973261505 @default.
- W2026692085 cites W1981940392 @default.
- W2026692085 cites W1994062476 @default.
- W2026692085 cites W2023518450 @default.
- W2026692085 cites W2026207807 @default.
- W2026692085 cites W2062941580 @default.
- W2026692085 cites W2078163737 @default.
- W2026692085 doi "https://doi.org/10.4028/www.scientific.net/amr.931-932.147" @default.
- W2026692085 hasPublicationYear "2014" @default.
- W2026692085 type Work @default.
- W2026692085 sameAs 2026692085 @default.
- W2026692085 citedByCount "0" @default.
- W2026692085 crossrefType "journal-article" @default.
- W2026692085 hasAuthorship W2026692085A5031239537 @default.
- W2026692085 hasAuthorship W2026692085A5047987472 @default.
- W2026692085 hasAuthorship W2026692085A5060878743 @default.
- W2026692085 hasConcept C113196181 @default.
- W2026692085 hasConcept C137637335 @default.
- W2026692085 hasConcept C159985019 @default.
- W2026692085 hasConcept C171250308 @default.
- W2026692085 hasConcept C185592680 @default.
- W2026692085 hasConcept C19067145 @default.
- W2026692085 hasConcept C191897082 @default.
- W2026692085 hasConcept C192562407 @default.
- W2026692085 hasConcept C194760766 @default.
- W2026692085 hasConcept C22423302 @default.
- W2026692085 hasConcept C26771246 @default.
- W2026692085 hasConcept C2778489163 @default.
- W2026692085 hasConcept C2779227376 @default.
- W2026692085 hasConcept C43617362 @default.
- W2026692085 hasConcept C525849907 @default.
- W2026692085 hasConcept C56052488 @default.
- W2026692085 hasConcept C61427134 @default.
- W2026692085 hasConcept C8010536 @default.
- W2026692085 hasConcept C87976508 @default.
- W2026692085 hasConceptScore W2026692085C113196181 @default.
- W2026692085 hasConceptScore W2026692085C137637335 @default.
- W2026692085 hasConceptScore W2026692085C159985019 @default.
- W2026692085 hasConceptScore W2026692085C171250308 @default.
- W2026692085 hasConceptScore W2026692085C185592680 @default.
- W2026692085 hasConceptScore W2026692085C19067145 @default.
- W2026692085 hasConceptScore W2026692085C191897082 @default.
- W2026692085 hasConceptScore W2026692085C192562407 @default.
- W2026692085 hasConceptScore W2026692085C194760766 @default.
- W2026692085 hasConceptScore W2026692085C22423302 @default.
- W2026692085 hasConceptScore W2026692085C26771246 @default.
- W2026692085 hasConceptScore W2026692085C2778489163 @default.
- W2026692085 hasConceptScore W2026692085C2779227376 @default.
- W2026692085 hasConceptScore W2026692085C43617362 @default.
- W2026692085 hasConceptScore W2026692085C525849907 @default.
- W2026692085 hasConceptScore W2026692085C56052488 @default.
- W2026692085 hasConceptScore W2026692085C61427134 @default.
- W2026692085 hasConceptScore W2026692085C8010536 @default.
- W2026692085 hasConceptScore W2026692085C87976508 @default.
- W2026692085 hasLocation W20266920851 @default.
- W2026692085 hasOpenAccess W2026692085 @default.
- W2026692085 hasPrimaryLocation W20266920851 @default.
- W2026692085 hasRelatedWork W1546617972 @default.
- W2026692085 hasRelatedWork W1562941104 @default.
- W2026692085 hasRelatedWork W1937723476 @default.
- W2026692085 hasRelatedWork W1976767033 @default.
- W2026692085 hasRelatedWork W1999534620 @default.
- W2026692085 hasRelatedWork W2024166613 @default.
- W2026692085 hasRelatedWork W2181869572 @default.
- W2026692085 hasRelatedWork W2358166371 @default.
- W2026692085 hasRelatedWork W2945835588 @default.
- W2026692085 hasRelatedWork W3094623132 @default.
- W2026692085 hasVolume "931-932" @default.
- W2026692085 isParatext "false" @default.
- W2026692085 isRetracted "false" @default.
- W2026692085 magId "2026692085" @default.
- W2026692085 workType "article" @default.