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- W2026736615 abstract "Silica-based nonplanar surface structures were fabricated by use of femtosecond laser lithography-assistedmicromachining (FLAM), which is a combined process of femtosecond laser lithography and plasma etching. Diffractiveoptical elements (DOEs) are widely used for photonic applications such as optical pickup, interconnection and so forth.Most DOEs have been produced by semiconductor fabrication process. Although this process is useful to formcomplicated fine structures, there exist two problems. First, it is rather difficult to fabricate nonplanar surfaces includingslopes and curves, which is effective to enhance diffraction efficiencies of DOEs. Second, microstructures cannot befabricated onto nonplanar substrates. In the FLAM, nonplanar patterns are directly written inside resists by use offemtosecond laser-induced nonlinear optical absorption. Then, the patterns are transferred to underlying silica glasses byCHF 3 plasma. By use of FLAM, we successfully fabricated silica-based microFresnel lenses including curves and slopeson planar substrates and cross-grating structures onto a convex microlens. In particular, as for the latter, uniform gratingstructures with smooth surfaces were observed even at top and curved regions of the lenses. The FLAM is expected to beuseful for the fabrication of highly functional DOEs such as diffractive/refractive hybrid microlenses." @default.
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- W2026736615 date "2008-02-07" @default.
- W2026736615 modified "2023-09-25" @default.
- W2026736615 title "Nonplanar surface structures of inorganic materials fabricated by femtosecond laser lithography" @default.
- W2026736615 doi "https://doi.org/10.1117/12.762542" @default.
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