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- W2026749376 abstract "The structure of amorphous SiN x :H films prepared by glow discharge decomposition of SiH 4 and NH 3 has been investigated by measurements of X-ray diffraction intensity. The first peak in atomic density function obtained by analysis of diffraction intensity indicates a nearest-neighbor distance of 1.74 Å which corresponds to the Si–N bond length of 1.730–1.745 Å in β-Si 3 N 4 crystal. We have also estimated the Si–N–Si–N bond configuration by comparing the corrected observed scattering intensity with the scattering intensity calculated using a simple bonding model. It has been shown that a Si atom bonded to a N atom with a coplanar bond has two tetrahedral bonds in the plane of the coplanar bonds." @default.
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- W2026749376 date "1996-05-01" @default.
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- W2026749376 title "Structural Study of Amorphous SiN<sub>x</sub>:H Films Produced by Plasma-Enhanced Chemical Vapor Deposition" @default.
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- W2026749376 doi "https://doi.org/10.1143/jjap.35.2557" @default.
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