Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026834300> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W2026834300 endingPage "31" @default.
- W2026834300 startingPage "24" @default.
- W2026834300 abstract "This paper describes the development of an electromagnetically driven two-axis MEMS mirror which steers an optical beam, and the dependence of the tilting angles on the magnet shape and size and the initial gap between planar coils and the magnet surface. A reflective Au mirror (1.8 × 1.8 mm2) can be tilted bidirectionally with an electromagnetic force induced by the current of the planar coils and the magnetic field of a permanent magnet. A newly developed MEMS mirror device (10 × 10 × 0.2 mm3) was set on a printed circuit board (15 × 15 × 1.0 mm3), and the board was fixed on a holder in which a magnet was inset. The utilized magnets were cubic (6, 8, and 15 mm square and 5 mm thick), cylindrical (6 and 8 mm in diameter and 5 mm thick), and spherical (8 mm in diameter) to investigate efficient actuation. The initial gaps of the planar coils and magnet surface were 0, 500, 1000, and 2000 μm. The magnetic flux density and its gradient decreased with distance from the magnet surface. The tilting angles of the MEMS mirror increased with decreasing size of the square magnet and shorter distance, and were largest when using a magnet 6 mm square and a 500-μm gap, in which condition the maximum tilting angles in the X and Y directions were 2.95 and 3.68 deg/mA, respectively. In addition, we obtained 3D-OCT images of human finger tissue by using a Fourier domain fiber interferometer with a newly developed MEMS mirror. © 2011 Wiley Periodicals, Inc. Electron Comm Jpn, 94(11): 24–31, 2011; Published online in Wiley Online Library (wileyonlinelibrary.com). DOI 10.1002/ecj.10377" @default.
- W2026834300 created "2016-06-24" @default.
- W2026834300 creator A5009926258 @default.
- W2026834300 creator A5012686649 @default.
- W2026834300 creator A5012922492 @default.
- W2026834300 creator A5034647533 @default.
- W2026834300 creator A5040900849 @default.
- W2026834300 creator A5061252963 @default.
- W2026834300 date "2011-10-21" @default.
- W2026834300 modified "2023-09-23" @default.
- W2026834300 title "Electromagnetically driven two-axis optical beam steering MEMS mirror and its dependence of actuation on magnetic field" @default.
- W2026834300 cites W1980193701 @default.
- W2026834300 cites W1994316917 @default.
- W2026834300 cites W2095157718 @default.
- W2026834300 cites W2130152551 @default.
- W2026834300 doi "https://doi.org/10.1002/ecj.10377" @default.
- W2026834300 hasPublicationYear "2011" @default.
- W2026834300 type Work @default.
- W2026834300 sameAs 2026834300 @default.
- W2026834300 citedByCount "1" @default.
- W2026834300 countsByYear W20268343002020 @default.
- W2026834300 crossrefType "journal-article" @default.
- W2026834300 hasAuthorship W2026834300A5009926258 @default.
- W2026834300 hasAuthorship W2026834300A5012686649 @default.
- W2026834300 hasAuthorship W2026834300A5012922492 @default.
- W2026834300 hasAuthorship W2026834300A5034647533 @default.
- W2026834300 hasAuthorship W2026834300A5040900849 @default.
- W2026834300 hasAuthorship W2026834300A5061252963 @default.
- W2026834300 hasConcept C115260700 @default.
- W2026834300 hasConcept C120665830 @default.
- W2026834300 hasConcept C121332964 @default.
- W2026834300 hasConcept C121684516 @default.
- W2026834300 hasConcept C134786449 @default.
- W2026834300 hasConcept C159605311 @default.
- W2026834300 hasConcept C16389437 @default.
- W2026834300 hasConcept C166689943 @default.
- W2026834300 hasConcept C168834538 @default.
- W2026834300 hasConcept C192562407 @default.
- W2026834300 hasConcept C37977207 @default.
- W2026834300 hasConcept C41008148 @default.
- W2026834300 hasConcept C49040817 @default.
- W2026834300 hasConcept C62520636 @default.
- W2026834300 hasConceptScore W2026834300C115260700 @default.
- W2026834300 hasConceptScore W2026834300C120665830 @default.
- W2026834300 hasConceptScore W2026834300C121332964 @default.
- W2026834300 hasConceptScore W2026834300C121684516 @default.
- W2026834300 hasConceptScore W2026834300C134786449 @default.
- W2026834300 hasConceptScore W2026834300C159605311 @default.
- W2026834300 hasConceptScore W2026834300C16389437 @default.
- W2026834300 hasConceptScore W2026834300C166689943 @default.
- W2026834300 hasConceptScore W2026834300C168834538 @default.
- W2026834300 hasConceptScore W2026834300C192562407 @default.
- W2026834300 hasConceptScore W2026834300C37977207 @default.
- W2026834300 hasConceptScore W2026834300C41008148 @default.
- W2026834300 hasConceptScore W2026834300C49040817 @default.
- W2026834300 hasConceptScore W2026834300C62520636 @default.
- W2026834300 hasIssue "11" @default.
- W2026834300 hasLocation W20268343001 @default.
- W2026834300 hasOpenAccess W2026834300 @default.
- W2026834300 hasPrimaryLocation W20268343001 @default.
- W2026834300 hasRelatedWork W1990046318 @default.
- W2026834300 hasRelatedWork W2001398966 @default.
- W2026834300 hasRelatedWork W2038568783 @default.
- W2026834300 hasRelatedWork W2312952484 @default.
- W2026834300 hasRelatedWork W2391301894 @default.
- W2026834300 hasRelatedWork W2783250424 @default.
- W2026834300 hasRelatedWork W2810224638 @default.
- W2026834300 hasRelatedWork W4322716946 @default.
- W2026834300 hasRelatedWork W4367298726 @default.
- W2026834300 hasRelatedWork W2046443514 @default.
- W2026834300 hasVolume "94" @default.
- W2026834300 isParatext "false" @default.
- W2026834300 isRetracted "false" @default.
- W2026834300 magId "2026834300" @default.
- W2026834300 workType "article" @default.