Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026842225> ?p ?o ?g. }
- W2026842225 endingPage "125005" @default.
- W2026842225 startingPage "125005" @default.
- W2026842225 abstract "A novel film bulk acoustic resonator (FBAR) with two resonant frequencies which have opposite reactions to temperature changes has been designed. The two resonant modes respond differently to changes in temperature and pressure, with the frequency shift being linearly correlated with temperature and pressure changes. By utilizing the FBAR's sealed back trench as a cavity, an on-chip single FBAR sensor suitable for measuring pressure and temperature simultaneously is proposed and demonstrated. The experimental results show that the pressure coefficient of frequency for the lower frequency peak of the FBAR sensors is approximately −17.4 ppm kPa−1, while that for the second peak is approximately −6.1 ppm kPa−1, both of them being much more sensitive than other existing pressure sensors. This dual mode on-chip pressure sensor is simple in structure and operation, can be fabricated at very low cost, and yet requires no specific package, therefore has great potential for applications." @default.
- W2026842225 created "2016-06-24" @default.
- W2026842225 creator A5002560091 @default.
- W2026842225 creator A5003500852 @default.
- W2026842225 creator A5005573956 @default.
- W2026842225 creator A5006973401 @default.
- W2026842225 creator A5007542426 @default.
- W2026842225 creator A5012459583 @default.
- W2026842225 creator A5027777058 @default.
- W2026842225 creator A5038695806 @default.
- W2026842225 creator A5089994151 @default.
- W2026842225 date "2012-10-25" @default.
- W2026842225 modified "2023-10-16" @default.
- W2026842225 title "Film bulk acoustic resonator pressure sensor with self temperature reference" @default.
- W2026842225 cites W1982970359 @default.
- W2026842225 cites W1992634697 @default.
- W2026842225 cites W1993494037 @default.
- W2026842225 cites W1999101777 @default.
- W2026842225 cites W2001733338 @default.
- W2026842225 cites W2003687725 @default.
- W2026842225 cites W2008144887 @default.
- W2026842225 cites W2016776383 @default.
- W2026842225 cites W2016978854 @default.
- W2026842225 cites W2026674150 @default.
- W2026842225 cites W2053720656 @default.
- W2026842225 cites W2063864361 @default.
- W2026842225 cites W2068097411 @default.
- W2026842225 cites W2068189288 @default.
- W2026842225 cites W2078820315 @default.
- W2026842225 cites W2102540376 @default.
- W2026842225 cites W2155161311 @default.
- W2026842225 cites W4248988271 @default.
- W2026842225 doi "https://doi.org/10.1088/0960-1317/22/12/125005" @default.
- W2026842225 hasPublicationYear "2012" @default.
- W2026842225 type Work @default.
- W2026842225 sameAs 2026842225 @default.
- W2026842225 citedByCount "23" @default.
- W2026842225 countsByYear W20268422252013 @default.
- W2026842225 countsByYear W20268422252014 @default.
- W2026842225 countsByYear W20268422252016 @default.
- W2026842225 countsByYear W20268422252017 @default.
- W2026842225 countsByYear W20268422252018 @default.
- W2026842225 countsByYear W20268422252019 @default.
- W2026842225 countsByYear W20268422252020 @default.
- W2026842225 countsByYear W20268422252021 @default.
- W2026842225 countsByYear W20268422252023 @default.
- W2026842225 crossrefType "journal-article" @default.
- W2026842225 hasAuthorship W2026842225A5002560091 @default.
- W2026842225 hasAuthorship W2026842225A5003500852 @default.
- W2026842225 hasAuthorship W2026842225A5005573956 @default.
- W2026842225 hasAuthorship W2026842225A5006973401 @default.
- W2026842225 hasAuthorship W2026842225A5007542426 @default.
- W2026842225 hasAuthorship W2026842225A5012459583 @default.
- W2026842225 hasAuthorship W2026842225A5027777058 @default.
- W2026842225 hasAuthorship W2026842225A5038695806 @default.
- W2026842225 hasAuthorship W2026842225A5089994151 @default.
- W2026842225 hasConcept C119599485 @default.
- W2026842225 hasConcept C121332964 @default.
- W2026842225 hasConcept C127413603 @default.
- W2026842225 hasConcept C155310634 @default.
- W2026842225 hasConcept C159985019 @default.
- W2026842225 hasConcept C165005293 @default.
- W2026842225 hasConcept C16643434 @default.
- W2026842225 hasConcept C192562407 @default.
- W2026842225 hasConcept C24326235 @default.
- W2026842225 hasConcept C24890656 @default.
- W2026842225 hasConcept C2779227376 @default.
- W2026842225 hasConcept C3019325349 @default.
- W2026842225 hasConcept C41325743 @default.
- W2026842225 hasConcept C49040817 @default.
- W2026842225 hasConcept C72293138 @default.
- W2026842225 hasConcept C80264047 @default.
- W2026842225 hasConcept C97126364 @default.
- W2026842225 hasConcept C97355855 @default.
- W2026842225 hasConceptScore W2026842225C119599485 @default.
- W2026842225 hasConceptScore W2026842225C121332964 @default.
- W2026842225 hasConceptScore W2026842225C127413603 @default.
- W2026842225 hasConceptScore W2026842225C155310634 @default.
- W2026842225 hasConceptScore W2026842225C159985019 @default.
- W2026842225 hasConceptScore W2026842225C165005293 @default.
- W2026842225 hasConceptScore W2026842225C16643434 @default.
- W2026842225 hasConceptScore W2026842225C192562407 @default.
- W2026842225 hasConceptScore W2026842225C24326235 @default.
- W2026842225 hasConceptScore W2026842225C24890656 @default.
- W2026842225 hasConceptScore W2026842225C2779227376 @default.
- W2026842225 hasConceptScore W2026842225C3019325349 @default.
- W2026842225 hasConceptScore W2026842225C41325743 @default.
- W2026842225 hasConceptScore W2026842225C49040817 @default.
- W2026842225 hasConceptScore W2026842225C72293138 @default.
- W2026842225 hasConceptScore W2026842225C80264047 @default.
- W2026842225 hasConceptScore W2026842225C97126364 @default.
- W2026842225 hasConceptScore W2026842225C97355855 @default.
- W2026842225 hasIssue "12" @default.
- W2026842225 hasLocation W20268422251 @default.
- W2026842225 hasOpenAccess W2026842225 @default.
- W2026842225 hasPrimaryLocation W20268422251 @default.
- W2026842225 hasRelatedWork W1550637024 @default.
- W2026842225 hasRelatedWork W1693914239 @default.