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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2026910222> ?p ?o ?g. }

• W2026910222 endingPage "300" @default.
• W2026910222 startingPage "297" @default.
• W2026910222 abstract "We report on the influence of the “absorber edge effect” on both the image contrast and resolution in X-ray Lithography. This effect is due to the finite absorption and the phase shift of the X photons in the absorber. Numerical simulations show that the resolution can be improved as the critical dimensions of lithography reach 50 nm. Experimental results confirm these predictions. Moreover, we use a semi-empirical model of the development to analyze our data of strongly enhanced edge effect. We also discuss the possible improvement of the simulation model." @default.
• W2026910222 created "2016-06-24" @default.
• W2026910222 creator A5000718357 @default.
• W2026910222 creator A5005113685 @default.
• W2026910222 creator A5011140961 @default.
• W2026910222 creator A5051578442 @default.
• W2026910222 creator A5064277887 @default.
• W2026910222 creator A5070592185 @default.
• W2026910222 creator A5086425118 @default.
• W2026910222 date "1998-03-01" @default.
• W2026910222 modified "2023-09-25" @default.
• W2026910222 title "Absorber edge effect in proximity X-ray lithography" @default.
• W2026910222 cites W2008606660 @default.
• W2026910222 cites W2022994719 @default.
• W2026910222 cites W2048656786 @default.
• W2026910222 cites W2060328325 @default.
• W2026910222 cites W2076463451 @default.
• W2026910222 cites W2079454151 @default.
• W2026910222 doi "https://doi.org/10.1016/s0167-9317(98)00068-9" @default.
• W2026910222 hasPublicationYear "1998" @default.
• W2026910222 type Work @default.
• W2026910222 sameAs 2026910222 @default.
• W2026910222 citedByCount "1" @default.
• W2026910222 crossrefType "journal-article" @default.
• W2026910222 hasAuthorship W2026910222A5000718357 @default.
• W2026910222 hasAuthorship W2026910222A5005113685 @default.
• W2026910222 hasAuthorship W2026910222A5011140961 @default.
• W2026910222 hasAuthorship W2026910222A5051578442 @default.
• W2026910222 hasAuthorship W2026910222A5064277887 @default.
• W2026910222 hasAuthorship W2026910222A5070592185 @default.
• W2026910222 hasAuthorship W2026910222A5086425118 @default.
• W2026910222 hasConcept C120665830 @default.
• W2026910222 hasConcept C121332964 @default.
• W2026910222 hasConcept C125287762 @default.
• W2026910222 hasConcept C138268822 @default.
• W2026910222 hasConcept C151193507 @default.
• W2026910222 hasConcept C154945302 @default.
• W2026910222 hasConcept C159317903 @default.
• W2026910222 hasConcept C162307627 @default.
• W2026910222 hasConcept C163581340 @default.
• W2026910222 hasConcept C171250308 @default.
• W2026910222 hasConcept C181966813 @default.
• W2026910222 hasConcept C182873914 @default.
• W2026910222 hasConcept C192562407 @default.
• W2026910222 hasConcept C200274948 @default.
• W2026910222 hasConcept C204223013 @default.
• W2026910222 hasConcept C2777953097 @default.
• W2026910222 hasConcept C2779227376 @default.
• W2026910222 hasConcept C2779328170 @default.
• W2026910222 hasConcept C2910127915 @default.
• W2026910222 hasConcept C41008148 @default.
• W2026910222 hasConcept C41794268 @default.
• W2026910222 hasConcept C44280652 @default.
• W2026910222 hasConcept C49040817 @default.
• W2026910222 hasConcept C50792271 @default.
• W2026910222 hasConcept C53524968 @default.
• W2026910222 hasConcept C58640550 @default.
• W2026910222 hasConcept C62520636 @default.
• W2026910222 hasConcept C76155785 @default.
• W2026910222 hasConceptScore W2026910222C120665830 @default.
• W2026910222 hasConceptScore W2026910222C121332964 @default.
• W2026910222 hasConceptScore W2026910222C125287762 @default.
• W2026910222 hasConceptScore W2026910222C138268822 @default.
• W2026910222 hasConceptScore W2026910222C151193507 @default.
• W2026910222 hasConceptScore W2026910222C154945302 @default.
• W2026910222 hasConceptScore W2026910222C159317903 @default.
• W2026910222 hasConceptScore W2026910222C162307627 @default.
• W2026910222 hasConceptScore W2026910222C163581340 @default.
• W2026910222 hasConceptScore W2026910222C171250308 @default.
• W2026910222 hasConceptScore W2026910222C181966813 @default.
• W2026910222 hasConceptScore W2026910222C182873914 @default.
• W2026910222 hasConceptScore W2026910222C192562407 @default.
• W2026910222 hasConceptScore W2026910222C200274948 @default.
• W2026910222 hasConceptScore W2026910222C204223013 @default.
• W2026910222 hasConceptScore W2026910222C2777953097 @default.
• W2026910222 hasConceptScore W2026910222C2779227376 @default.
• W2026910222 hasConceptScore W2026910222C2779328170 @default.
• W2026910222 hasConceptScore W2026910222C2910127915 @default.
• W2026910222 hasConceptScore W2026910222C41008148 @default.
• W2026910222 hasConceptScore W2026910222C41794268 @default.
• W2026910222 hasConceptScore W2026910222C44280652 @default.
• W2026910222 hasConceptScore W2026910222C49040817 @default.
• W2026910222 hasConceptScore W2026910222C50792271 @default.
• W2026910222 hasConceptScore W2026910222C53524968 @default.
• W2026910222 hasConceptScore W2026910222C58640550 @default.
• W2026910222 hasConceptScore W2026910222C62520636 @default.
• W2026910222 hasConceptScore W2026910222C76155785 @default.
• W2026910222 hasLocation W20269102221 @default.
• W2026910222 hasOpenAccess W2026910222 @default.
• W2026910222 hasPrimaryLocation W20269102221 @default.
• W2026910222 hasRelatedWork W1983830044 @default.
• W2026910222 hasRelatedWork W1997073950 @default.
• W2026910222 hasRelatedWork W1997572480 @default.
• W2026910222 hasRelatedWork W1999665033 @default.
• W2026910222 hasRelatedWork W2005967583 @default.
• W2026910222 hasRelatedWork W2006278181 @default.
• W2026910222 hasRelatedWork W2016507459 @default.
• W2026910222 hasRelatedWork W2024834305 @default.

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