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• W2027416492 endingPage "86" @default.
• W2027416492 startingPage "79" @default.
• W2027416492 abstract "The 500 keV Xe2+ irradiation-induced anisotropic deformation of ordered colloidal silica nanoparticulate masks is followed using 2 MeV 4He+ Rutherford Backscattering Spectrometry (RBS) with different measurement geometries and the improved data analysis capabilities of the RBS-MAST spectrum simulation code. The three-dimensional (3D) geometrical transformation from spherical to oblate ellipsoidal and polygonal shape and the decrease of the mask’s hole size is described. The masking properties of the silica monolayer and the depth distribution of Xe in the underlying Si substrate vs. the irradiated Xe2+ fluence are discussed. Field Emission Scanning Electron Microscopy (FESEM) is applied as complementary characterization tool. Our results give contribution to clarify the impact of ion–nanoparticle interactions on the potentials and limits of nanosphere lithography. We also show the capability of the conventional RBS technique to characterize laterally ordered submicron-sized three-dimensional structures." @default.
• W2027416492 created "2016-06-24" @default.
• W2027416492 creator A5009674522 @default.
• W2027416492 creator A5020410487 @default.
• W2027416492 creator A5034315986 @default.
• W2027416492 creator A5041213571 @default.
• W2027416492 creator A5050561511 @default.
• W2027416492 creator A5065272683 @default.
• W2027416492 date "2010-01-01" @default.
• W2027416492 modified "2023-10-16" @default.
• W2027416492 title "A 3D-RBS study of irradiation-induced deformation and masking properties of ordered colloidal nanoparticulate masks" @default.
• W2027416492 cites W1965555196 @default.
• W2027416492 cites W1969373380 @default.
• W2027416492 cites W1970983660 @default.
• W2027416492 cites W1973274067 @default.
• W2027416492 cites W1979493382 @default.
• W2027416492 cites W1984753988 @default.
• W2027416492 cites W1986670137 @default.
• W2027416492 cites W1993356395 @default.
• W2027416492 cites W2003333956 @default.
• W2027416492 cites W2005304717 @default.
• W2027416492 cites W2005955494 @default.
• W2027416492 cites W2008632182 @default.
• W2027416492 cites W2014565202 @default.
• W2027416492 cites W2015100197 @default.
• W2027416492 cites W2019878234 @default.
• W2027416492 cites W2030434722 @default.
• W2027416492 cites W2032392921 @default.
• W2027416492 cites W2034133626 @default.
• W2027416492 cites W2043877045 @default.
• W2027416492 cites W2046895154 @default.
• W2027416492 cites W2053591432 @default.
• W2027416492 cites W2061158555 @default.
• W2027416492 cites W2061855595 @default.
• W2027416492 cites W2070889113 @default.
• W2027416492 cites W2080931946 @default.
• W2027416492 cites W2089124524 @default.
• W2027416492 cites W2089850319 @default.
• W2027416492 cites W2091059486 @default.
• W2027416492 cites W2130861490 @default.
• W2027416492 cites W2142961101 @default.
• W2027416492 cites W2179067707 @default.
• W2027416492 cites W2330963033 @default.
• W2027416492 cites W6422988 @default.
• W2027416492 doi "https://doi.org/10.1016/j.nimb.2009.09.039" @default.
• W2027416492 hasPublicationYear "2010" @default.
• W2027416492 type Work @default.
• W2027416492 sameAs 2027416492 @default.
• W2027416492 citedByCount "18" @default.
• W2027416492 countsByYear W20274164922012 @default.
• W2027416492 countsByYear W20274164922013 @default.
• W2027416492 countsByYear W20274164922014 @default.
• W2027416492 countsByYear W20274164922015 @default.
• W2027416492 countsByYear W20274164922016 @default.
• W2027416492 countsByYear W20274164922017 @default.
• W2027416492 countsByYear W20274164922020 @default.
• W2027416492 countsByYear W20274164922022 @default.
• W2027416492 countsByYear W20274164922023 @default.
• W2027416492 crossrefType "journal-article" @default.
• W2027416492 hasAuthorship W2027416492A5009674522 @default.
• W2027416492 hasAuthorship W2027416492A5020410487 @default.
• W2027416492 hasAuthorship W2027416492A5034315986 @default.
• W2027416492 hasAuthorship W2027416492A5041213571 @default.
• W2027416492 hasAuthorship W2027416492A5050561511 @default.
• W2027416492 hasAuthorship W2027416492A5065272683 @default.
• W2027416492 hasConcept C111337013 @default.
• W2027416492 hasConcept C120665830 @default.
• W2027416492 hasConcept C121332964 @default.
• W2027416492 hasConcept C136525101 @default.
• W2027416492 hasConcept C142362112 @default.
• W2027416492 hasConcept C142724271 @default.
• W2027416492 hasConcept C153349607 @default.
• W2027416492 hasConcept C155672457 @default.
• W2027416492 hasConcept C171250308 @default.
• W2027416492 hasConcept C185544564 @default.
• W2027416492 hasConcept C185592680 @default.
• W2027416492 hasConcept C19067145 @default.
• W2027416492 hasConcept C192562407 @default.
• W2027416492 hasConcept C204787440 @default.
• W2027416492 hasConcept C22078206 @default.
• W2027416492 hasConcept C2777402240 @default.
• W2027416492 hasConcept C2780547777 @default.
• W2027416492 hasConcept C41999313 @default.
• W2027416492 hasConcept C43766710 @default.
• W2027416492 hasConcept C71924100 @default.
• W2027416492 hasConcept C85725439 @default.
• W2027416492 hasConceptScore W2027416492C111337013 @default.
• W2027416492 hasConceptScore W2027416492C120665830 @default.
• W2027416492 hasConceptScore W2027416492C121332964 @default.
• W2027416492 hasConceptScore W2027416492C136525101 @default.
• W2027416492 hasConceptScore W2027416492C142362112 @default.
• W2027416492 hasConceptScore W2027416492C142724271 @default.
• W2027416492 hasConceptScore W2027416492C153349607 @default.
• W2027416492 hasConceptScore W2027416492C155672457 @default.
• W2027416492 hasConceptScore W2027416492C171250308 @default.
• W2027416492 hasConceptScore W2027416492C185544564 @default.
• W2027416492 hasConceptScore W2027416492C185592680 @default.
• W2027416492 hasConceptScore W2027416492C19067145 @default.

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