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- W2027574493 abstract "The changes in capacitance, temperature coefficient of capacitance (t.c.c.) and dissipation factor (tan δ) of tantalum thin film capacitors subjected to heat treatment depend significantly on the nitrogen content of the Ta and the Ta2O5. If tantalum films deposited by reactive sputtering contain between 5 and 15 at.% nitrogen, the tan δ and t.c.c. of the finished capacitors can be reduced to constant values of 1.5 × 10-3 and 135 ppm K-1 respectively (test frequency 1 kHz) by heat treatment at temperatures between 250° and 350°C. However, if the nitrogen content is smaller or greater, or if β-Ta is used, both the t.c.c. and tan δ increase sharply with rising temperature and prolonged heat treatment." @default.
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- W2027574493 date "1975-05-01" @default.
- W2027574493 modified "2023-09-25" @default.
- W2027574493 title "Nitrogen-doped tantalum thin film capacitors with improved temperature stability" @default.
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