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- W2027595162 abstract "This paper describes the development of DC-contact RF-MEMS SPST, SP3T, and SP4T switches implemented with a thin-film cantilever. Using aluminium as the sacrificial layer in the fabrication process, flat cantilevers are realized with a measured actuation voltage of 50~70 V. The SPST switch is used as a building block to realize more complicated SP3T and SP4T switches for use in true-time delay phase shifters. The preliminary measurements of the SP3T and SP4T switches demonstrate isolation of 20 dB and insertion loss less than 2 dB up to 50 GHz." @default.
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- W2027595162 date "2008-10-01" @default.
- W2027595162 modified "2023-09-28" @default.
- W2027595162 title "DC-Contact RF MEMS Switches using Thin-Film Cantilevers" @default.
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- W2027595162 doi "https://doi.org/10.1109/emicc.2008.4772309" @default.
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