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- W2027603623 abstract "The letter describes the fabrication procedure and the electrical properties of a double polysilicon plate capacitor with composite SiO2/Si3N4 insulators. The presence of the Si3N4 layer allows elimination completely of low-voltage breakdown events and reduces the leakage current to the 10?9 A/cm2 level. Different layout configurations are compared based on the evaluation of experimental data." @default.
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- W2027603623 date "1982-01-01" @default.
- W2027603623 modified "2023-09-27" @default.
- W2027603623 title "Double polysilicon plate capacitors with oxide/nitride insulator" @default.
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- W2027603623 doi "https://doi.org/10.1049/el:19820025" @default.
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