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- W2027836045 endingPage "025007" @default.
- W2027836045 startingPage "025007" @default.
- W2027836045 abstract "The assessment of H and H2 densities by mass spectrometry methods in silane–hydrogen (SiH4–H2) plasma-assisted CVD processes requires estimation of the depletion factor for the parent molecules (SiH4 and H2). Such an estimation is non-trivial as H2 is both depleted and generated in SiH4–H2 plasmas, and the usual depletion factor becomes a 'depletion-generation' factor. A method for calculating the depletion-generation factor in SiH4–H2 plasmas is presented and applied to de-convolute energy distributions of H and H2 from energy-resolved residual gas analysis (ERRGA) performed using a HIDEN EQP300 mass-energy analyser. The ERRGA method is described and the energy distribution of the H radicals and H2 molecules is obtained for an LEPECVD plasma during the transition from a-Si to nc-Si deposition at constant discharge operation parameters for gas input flow rates of 50 sccm Ar and 10 sccm SiH4, with the addition of H2 (0–50 sccm) at reactor pressures of 1–3 Pa. The H and H2 energy distributions show two main groups, one below 0.7 eV and another at 1.2–1.5 eV, with a strong variation in total density with increase in H2 input. Above 30 sccm H2 input, a step increase in the lower energy component is observed. Energy distributions are discussed in relation to H and H2 generation reactions and gas heating in PECVD processes." @default.
- W2027836045 created "2016-06-24" @default.
- W2027836045 creator A5035431137 @default.
- W2027836045 date "2011-02-28" @default.
- W2027836045 modified "2023-09-25" @default.
- W2027836045 title "Energy distributions of H and H2in a Ar–SiH4–H2plasma during transition from a-Si to nc-Si film deposition" @default.
- W2027836045 cites W1975741163 @default.
- W2027836045 cites W1978205415 @default.
- W2027836045 cites W1979682005 @default.
- W2027836045 cites W1980481113 @default.
- W2027836045 cites W1980490445 @default.
- W2027836045 cites W1984217214 @default.
- W2027836045 cites W1986898324 @default.
- W2027836045 cites W1989708886 @default.
- W2027836045 cites W1990061261 @default.
- W2027836045 cites W1993393696 @default.
- W2027836045 cites W1997390186 @default.
- W2027836045 cites W2001579833 @default.
- W2027836045 cites W2003076118 @default.
- W2027836045 cites W2003672591 @default.
- W2027836045 cites W2010651594 @default.
- W2027836045 cites W2013996497 @default.
- W2027836045 cites W2018186940 @default.
- W2027836045 cites W2021078917 @default.
- W2027836045 cites W2029006136 @default.
- W2027836045 cites W2048499763 @default.
- W2027836045 cites W2049864735 @default.
- W2027836045 cites W2049937148 @default.
- W2027836045 cites W2050568022 @default.
- W2027836045 cites W2075716084 @default.
- W2027836045 cites W2080107142 @default.
- W2027836045 cites W2084085928 @default.
- W2027836045 cites W2092233475 @default.
- W2027836045 cites W2096831510 @default.
- W2027836045 cites W2108679314 @default.
- W2027836045 cites W2110007873 @default.
- W2027836045 cites W2116954066 @default.
- W2027836045 cites W2118664683 @default.
- W2027836045 cites W2142947176 @default.
- W2027836045 cites W2151454484 @default.
- W2027836045 cites W2154775754 @default.
- W2027836045 cites W2157804889 @default.
- W2027836045 doi "https://doi.org/10.1088/0963-0252/20/2/025007" @default.
- W2027836045 hasPublicationYear "2011" @default.
- W2027836045 type Work @default.
- W2027836045 sameAs 2027836045 @default.
- W2027836045 citedByCount "1" @default.
- W2027836045 countsByYear W20278360452013 @default.
- W2027836045 crossrefType "journal-article" @default.
- W2027836045 hasAuthorship W2027836045A5035431137 @default.
- W2027836045 hasConcept C113196181 @default.
- W2027836045 hasConcept C121332964 @default.
- W2027836045 hasConcept C151730666 @default.
- W2027836045 hasConcept C178790620 @default.
- W2027836045 hasConcept C185592680 @default.
- W2027836045 hasConcept C186370098 @default.
- W2027836045 hasConcept C192562407 @default.
- W2027836045 hasConcept C2816523 @default.
- W2027836045 hasConcept C62520636 @default.
- W2027836045 hasConcept C64297162 @default.
- W2027836045 hasConcept C86803240 @default.
- W2027836045 hasConceptScore W2027836045C113196181 @default.
- W2027836045 hasConceptScore W2027836045C121332964 @default.
- W2027836045 hasConceptScore W2027836045C151730666 @default.
- W2027836045 hasConceptScore W2027836045C178790620 @default.
- W2027836045 hasConceptScore W2027836045C185592680 @default.
- W2027836045 hasConceptScore W2027836045C186370098 @default.
- W2027836045 hasConceptScore W2027836045C192562407 @default.
- W2027836045 hasConceptScore W2027836045C2816523 @default.
- W2027836045 hasConceptScore W2027836045C62520636 @default.
- W2027836045 hasConceptScore W2027836045C64297162 @default.
- W2027836045 hasConceptScore W2027836045C86803240 @default.
- W2027836045 hasIssue "2" @default.
- W2027836045 hasLocation W20278360451 @default.
- W2027836045 hasOpenAccess W2027836045 @default.
- W2027836045 hasPrimaryLocation W20278360451 @default.
- W2027836045 hasRelatedWork W1703299950 @default.
- W2027836045 hasRelatedWork W1995748223 @default.
- W2027836045 hasRelatedWork W1996512336 @default.
- W2027836045 hasRelatedWork W2058076485 @default.
- W2027836045 hasRelatedWork W2899084033 @default.
- W2027836045 hasRelatedWork W3009406878 @default.
- W2027836045 hasRelatedWork W3022633207 @default.
- W2027836045 hasRelatedWork W3090969751 @default.
- W2027836045 hasRelatedWork W3195939668 @default.
- W2027836045 hasRelatedWork W2092804911 @default.
- W2027836045 hasVolume "20" @default.
- W2027836045 isParatext "false" @default.
- W2027836045 isRetracted "false" @default.
- W2027836045 magId "2027836045" @default.
- W2027836045 workType "article" @default.