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- W2027944258 abstract "We present the design, microfabrication and assembly of dual‐polarization absorber‐coupled Transition Edge Sensor (TES) bolometer detectors for cosmic microwave background B‐mode polarization studies. The device consists of two separate dies incorporating suspended silicon nitride membranes within silicon frames, carefully aligned perpendicularly and fixtured face‐to‐face. Polarization sensitivity around 95 GHz is provided by a single dipole‐like absorber element; we briefly analyze this absorber‐in‐waveguide configuration in closed form using the EMF method. Proximity effect Mo/Au bilayers provide control of the TES critical temperature between 400 mK and 600 mK, with a normal resistance Rn∼1Ω. DC magnetron sputtering, wet etching, and liftoff were employed for TES fabrication. Optimization of the superconducting Mo thin film utilized independent RF bias applied to the substrate during deposition in a confocal geometry. This technique allows outstanding thin film uniformity and stress to be achieved simultaneously over a 4” wafer surface, leading to excellent superconducting properties. Device thermal conductance in the range from 25–250pW/K was achieved using suspended silicon nitride membranes 1 micron thick. The value of the thermal conductance depends very strongly upon the surface roughness, and therefore in turn upon the treatment of the silicon nitride material during fabrication." @default.
- W2027944258 created "2016-06-24" @default.
- W2027944258 creator A5002340765 @default.
- W2027944258 creator A5003740289 @default.
- W2027944258 creator A5005289807 @default.
- W2027944258 creator A5006642836 @default.
- W2027944258 creator A5006920547 @default.
- W2027944258 creator A5007170684 @default.
- W2027944258 creator A5023310623 @default.
- W2027944258 creator A5033284286 @default.
- W2027944258 creator A5035774216 @default.
- W2027944258 creator A5038097577 @default.
- W2027944258 creator A5040775718 @default.
- W2027944258 creator A5044720026 @default.
- W2027944258 creator A5067076584 @default.
- W2027944258 creator A5071473716 @default.
- W2027944258 creator A5076559726 @default.
- W2027944258 creator A5078536044 @default.
- W2027944258 date "2009-01-01" @default.
- W2027944258 modified "2023-10-12" @default.
- W2027944258 title "Design and Fabrication of Argonne∕KICP Detectors for CMB Polarization" @default.
- W2027944258 doi "https://doi.org/10.1063/1.3292352" @default.
- W2027944258 hasPublicationYear "2009" @default.
- W2027944258 type Work @default.
- W2027944258 sameAs 2027944258 @default.
- W2027944258 citedByCount "3" @default.
- W2027944258 countsByYear W20279442582012 @default.
- W2027944258 countsByYear W20279442582013 @default.
- W2027944258 crossrefType "proceedings-article" @default.
- W2027944258 hasAuthorship W2027944258A5002340765 @default.
- W2027944258 hasAuthorship W2027944258A5003740289 @default.
- W2027944258 hasAuthorship W2027944258A5005289807 @default.
- W2027944258 hasAuthorship W2027944258A5006642836 @default.
- W2027944258 hasAuthorship W2027944258A5006920547 @default.
- W2027944258 hasAuthorship W2027944258A5007170684 @default.
- W2027944258 hasAuthorship W2027944258A5023310623 @default.
- W2027944258 hasAuthorship W2027944258A5033284286 @default.
- W2027944258 hasAuthorship W2027944258A5035774216 @default.
- W2027944258 hasAuthorship W2027944258A5038097577 @default.
- W2027944258 hasAuthorship W2027944258A5040775718 @default.
- W2027944258 hasAuthorship W2027944258A5044720026 @default.
- W2027944258 hasAuthorship W2027944258A5067076584 @default.
- W2027944258 hasAuthorship W2027944258A5071473716 @default.
- W2027944258 hasAuthorship W2027944258A5076559726 @default.
- W2027944258 hasAuthorship W2027944258A5078536044 @default.
- W2027944258 hasConcept C120665830 @default.
- W2027944258 hasConcept C121332964 @default.
- W2027944258 hasConcept C136525101 @default.
- W2027944258 hasConcept C142724271 @default.
- W2027944258 hasConcept C160671074 @default.
- W2027944258 hasConcept C192562407 @default.
- W2027944258 hasConcept C204787440 @default.
- W2027944258 hasConcept C21028948 @default.
- W2027944258 hasConcept C2777431650 @default.
- W2027944258 hasConcept C2778769035 @default.
- W2027944258 hasConcept C49040817 @default.
- W2027944258 hasConcept C527607 @default.
- W2027944258 hasConcept C544956773 @default.
- W2027944258 hasConcept C71924100 @default.
- W2027944258 hasConcept C94915269 @default.
- W2027944258 hasConceptScore W2027944258C120665830 @default.
- W2027944258 hasConceptScore W2027944258C121332964 @default.
- W2027944258 hasConceptScore W2027944258C136525101 @default.
- W2027944258 hasConceptScore W2027944258C142724271 @default.
- W2027944258 hasConceptScore W2027944258C160671074 @default.
- W2027944258 hasConceptScore W2027944258C192562407 @default.
- W2027944258 hasConceptScore W2027944258C204787440 @default.
- W2027944258 hasConceptScore W2027944258C21028948 @default.
- W2027944258 hasConceptScore W2027944258C2777431650 @default.
- W2027944258 hasConceptScore W2027944258C2778769035 @default.
- W2027944258 hasConceptScore W2027944258C49040817 @default.
- W2027944258 hasConceptScore W2027944258C527607 @default.
- W2027944258 hasConceptScore W2027944258C544956773 @default.
- W2027944258 hasConceptScore W2027944258C71924100 @default.
- W2027944258 hasConceptScore W2027944258C94915269 @default.
- W2027944258 hasLocation W20279442581 @default.
- W2027944258 hasOpenAccess W2027944258 @default.
- W2027944258 hasPrimaryLocation W20279442581 @default.
- W2027944258 hasRelatedWork W1534416854 @default.
- W2027944258 hasRelatedWork W1676547379 @default.
- W2027944258 hasRelatedWork W1970197735 @default.
- W2027944258 hasRelatedWork W2016475879 @default.
- W2027944258 hasRelatedWork W2027944258 @default.
- W2027944258 hasRelatedWork W2063388817 @default.
- W2027944258 hasRelatedWork W2071461354 @default.
- W2027944258 hasRelatedWork W2089661823 @default.
- W2027944258 hasRelatedWork W4243456111 @default.
- W2027944258 hasRelatedWork W4307555315 @default.
- W2027944258 isParatext "false" @default.
- W2027944258 isRetracted "false" @default.
- W2027944258 magId "2027944258" @default.
- W2027944258 workType "article" @default.