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- W2027946268 abstract "IR and UV ablation experiments were performed for freestanding polyimide foils (75 μm) and spincoated films of polyimide (6–7 μm). Compared to results reported in the literature a considerably improved etch quality was obtained with a pulsed TEA CO2 laser. Distinct interference effects were found for KrF laser radiation and CO2 laser radiation. The fluence dependence of the etch rates was studied for excimer laser light at 248 nm and IR laser light at 1082.3, 1057.3 and 970.5 cm-1. The optical absorption coefficient was determined by reflectivity and transmittance measurements." @default.
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- W2027946268 date "1989-12-01" @default.
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- W2027946268 title "Photoablation of polyimide with IR and UV laser radiation" @default.
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