Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028013429> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2028013429 endingPage "L506" @default.
- W2028013429 startingPage "L506" @default.
- W2028013429 abstract "The thermal stability of low-dielectric-constant ( ε ) interlayers for advanced ULSI's is studied. Thickness decreases by 7 and 4% with annealing from 390 to 450°C in poly-arylether and hydro-organo-siloxane polymer layers. The thickness variation is as low as 2% in the carbon-rich fluorinated carbon (FC) (F/C=0.90) layer at temperatures between 250 and 450°C. The composition of F/C decreases markedly with the increase of temperature above 450°C in high F/C composition, such as 1.20 and 1.28, FC layers. However, this composition is invariable with annealing at 450°C in layers with low F/C composition (F/C=0.90) because F does not leave the F-C bond in this layer. The barrier effect for a FC low ε interlayer is studied in titanium nitride (TiN) and tantalum nitride (TaN) barrier layers. When polycrystalline TiN and TaN barrier layers are used, significant interfacial reaction occurs at low temperatures. That is, Ti and Ta of TiN and TaN layers diffuse deeply into the FC layer at 350°C. Penetration of F from the FC layer into these barrier layers occurs respectively at 450°C. However, diffusion of Ta and F into FC and TaN can be suppressed if a microcrystalline TaN (TaN 0.90 ) barrier layer is used; such a N-rich microcrystalline TaN layer can be deposited by reactive sputtering." @default.
- W2028013429 created "2016-06-24" @default.
- W2028013429 creator A5022127230 @default.
- W2028013429 creator A5041116560 @default.
- W2028013429 creator A5053003207 @default.
- W2028013429 creator A5064660860 @default.
- W2028013429 creator A5078798873 @default.
- W2028013429 date "2000-06-01" @default.
- W2028013429 modified "2023-10-18" @default.
- W2028013429 title "Thermal Stability and Interfacial Reaction of Barrier Layers with Low-Dielectric-Constant Fluorinated Carbon Interlayer" @default.
- W2028013429 cites W1964525623 @default.
- W2028013429 cites W1985326153 @default.
- W2028013429 doi "https://doi.org/10.1143/jjap.39.l506" @default.
- W2028013429 hasPublicationYear "2000" @default.
- W2028013429 type Work @default.
- W2028013429 sameAs 2028013429 @default.
- W2028013429 citedByCount "4" @default.
- W2028013429 crossrefType "journal-article" @default.
- W2028013429 hasAuthorship W2028013429A5022127230 @default.
- W2028013429 hasAuthorship W2028013429A5041116560 @default.
- W2028013429 hasAuthorship W2028013429A5053003207 @default.
- W2028013429 hasAuthorship W2028013429A5064660860 @default.
- W2028013429 hasAuthorship W2028013429A5078798873 @default.
- W2028013429 hasConcept C113196181 @default.
- W2028013429 hasConcept C127413603 @default.
- W2028013429 hasConcept C133386390 @default.
- W2028013429 hasConcept C137637335 @default.
- W2028013429 hasConcept C159985019 @default.
- W2028013429 hasConcept C171250308 @default.
- W2028013429 hasConcept C178790620 @default.
- W2028013429 hasConcept C185592680 @default.
- W2028013429 hasConcept C19067145 @default.
- W2028013429 hasConcept C191897082 @default.
- W2028013429 hasConcept C192562407 @default.
- W2028013429 hasConcept C194760766 @default.
- W2028013429 hasConcept C201370411 @default.
- W2028013429 hasConcept C22423302 @default.
- W2028013429 hasConcept C2777855556 @default.
- W2028013429 hasConcept C2778112282 @default.
- W2028013429 hasConcept C2778836790 @default.
- W2028013429 hasConcept C2779227376 @default.
- W2028013429 hasConcept C2779833192 @default.
- W2028013429 hasConcept C42360764 @default.
- W2028013429 hasConcept C49040817 @default.
- W2028013429 hasConcept C525849907 @default.
- W2028013429 hasConcept C59061564 @default.
- W2028013429 hasConcept C8010536 @default.
- W2028013429 hasConceptScore W2028013429C113196181 @default.
- W2028013429 hasConceptScore W2028013429C127413603 @default.
- W2028013429 hasConceptScore W2028013429C133386390 @default.
- W2028013429 hasConceptScore W2028013429C137637335 @default.
- W2028013429 hasConceptScore W2028013429C159985019 @default.
- W2028013429 hasConceptScore W2028013429C171250308 @default.
- W2028013429 hasConceptScore W2028013429C178790620 @default.
- W2028013429 hasConceptScore W2028013429C185592680 @default.
- W2028013429 hasConceptScore W2028013429C19067145 @default.
- W2028013429 hasConceptScore W2028013429C191897082 @default.
- W2028013429 hasConceptScore W2028013429C192562407 @default.
- W2028013429 hasConceptScore W2028013429C194760766 @default.
- W2028013429 hasConceptScore W2028013429C201370411 @default.
- W2028013429 hasConceptScore W2028013429C22423302 @default.
- W2028013429 hasConceptScore W2028013429C2777855556 @default.
- W2028013429 hasConceptScore W2028013429C2778112282 @default.
- W2028013429 hasConceptScore W2028013429C2778836790 @default.
- W2028013429 hasConceptScore W2028013429C2779227376 @default.
- W2028013429 hasConceptScore W2028013429C2779833192 @default.
- W2028013429 hasConceptScore W2028013429C42360764 @default.
- W2028013429 hasConceptScore W2028013429C49040817 @default.
- W2028013429 hasConceptScore W2028013429C525849907 @default.
- W2028013429 hasConceptScore W2028013429C59061564 @default.
- W2028013429 hasConceptScore W2028013429C8010536 @default.
- W2028013429 hasIssue "6A" @default.
- W2028013429 hasLocation W20280134291 @default.
- W2028013429 hasOpenAccess W2028013429 @default.
- W2028013429 hasPrimaryLocation W20280134291 @default.
- W2028013429 hasRelatedWork W1985919694 @default.
- W2028013429 hasRelatedWork W1994753809 @default.
- W2028013429 hasRelatedWork W2004290544 @default.
- W2028013429 hasRelatedWork W2020185829 @default.
- W2028013429 hasRelatedWork W2022805610 @default.
- W2028013429 hasRelatedWork W2043673973 @default.
- W2028013429 hasRelatedWork W2047631033 @default.
- W2028013429 hasRelatedWork W2074743978 @default.
- W2028013429 hasRelatedWork W2076677140 @default.
- W2028013429 hasRelatedWork W2087024410 @default.
- W2028013429 hasVolume "39" @default.
- W2028013429 isParatext "false" @default.
- W2028013429 isRetracted "false" @default.
- W2028013429 magId "2028013429" @default.
- W2028013429 workType "article" @default.