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- W2028048972 abstract "The most important forces that influence the motion of particles in a glow discharge plasma are the electrostatic force, the ion drag force, the neutral drag force, thermophoresis, and gravity. In this article we present a transport model that predicts the distribution of particles in plasma reactors in terms of the fundamental forces that act on the particles. We compare the model predictions to experimental measurements of particle distributions in a rf parallel plate plasma reactor." @default.
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- W2028048972 date "1995-08-15" @default.
- W2028048972 modified "2023-09-23" @default.
- W2028048972 title "Derivation and experimental verification of a particulate transport model for a glow discharge" @default.
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- W2028048972 doi "https://doi.org/10.1063/1.360145" @default.
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