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- W2028135890 abstract "Here, we describe the fabrication of diffraction gratings in the {100} surfaces of silicon by preferential etching. The gratings thus made have grooves with well-defined geometric shape and bounded by nearly perfect reflecting walls. Meanwhile, the importance of utilizing this technique in integrated optics is also discussed." @default.
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- W2028135890 title "Preferentially etched diffraction gratings in silicon" @default.
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