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- W2028149377 abstract "Isolated diamond particles grown by chemical vapor deposition on a mirror-polished Si substrate have been studied by cross-sectional transmission electron microscopy. Focused ion beam micromachining enabled the cross-sectional specimen to be carved out precisely at the center of the particle. Atomic scale observation of the diamond/Si interface revealed the presence of an ∼3 nm thick amorphous intermediate layer including a few pits around the nucleation site of the particle. Growth mechanism and relationship between growth orientation and internal defect structure of the diamond particle are discussed." @default.
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- W2028149377 date "1995-07-31" @default.
- W2028149377 modified "2023-09-27" @default.
- W2028149377 title "Cross-sectional transmission electron microscopy study of isolated diamond particles grown on a mirror-polished Si substrate" @default.
- W2028149377 doi "https://doi.org/10.1063/1.115185" @default.
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