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• W2028215537 abstract "This paper reports that the mechanical reliability of the micromirror can be improved by a new spring structure called interdigitated cantilevers without any help of mechanically reliable materials and any control of operation condition. The micromirror with interdigitated cantilevers was subjected to 2 times lower maximum Von Mises stress for cyclic rotations than a conventional micromirror with a hinge when two micromirrors have the same performance and the same rotation angle in analytical calculations and FEM simulations. The micromirror with interdigitated cantilevers made of a pure aluminum was operated successfully without any failure over an operation time of 500 hours and 2×1010 cycles at air condition (23°C and 45 %)." @default.
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• W2028215537 date "2010-01-01" @default.
• W2028215537 modified "2023-09-25" @default.
• W2028215537 title "Study of a new spring structure for a mechanically reliable micromirror" @default.
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• W2028215537 doi "https://doi.org/10.1109/memsys.2010.5442281" @default.
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