Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028304023> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2028304023 endingPage "131" @default.
- W2028304023 startingPage "129" @default.
- W2028304023 abstract "The aperture effect in plasma etching of deep trenches is theoretically investigated. Three possible mechanisms are proposed: limiting of ion and radical delivery to the etching region and redeposition of the reaction products. Integral equations are derived and numerically solved for rectangular trench profiles and a cosine law for surface scattering of the active particles. The approach suggested allows generalization for multicomponent plasma systems." @default.
- W2028304023 created "2016-06-24" @default.
- W2028304023 creator A5026097248 @default.
- W2028304023 creator A5041471351 @default.
- W2028304023 creator A5053510161 @default.
- W2028304023 creator A5083569509 @default.
- W2028304023 creator A5091794842 @default.
- W2028304023 date "1991-01-01" @default.
- W2028304023 modified "2023-10-14" @default.
- W2028304023 title "Aperture effect in plasma etching of deep silicon trenches" @default.
- W2028304023 cites W2058660742 @default.
- W2028304023 cites W2070583927 @default.
- W2028304023 doi "https://doi.org/10.1016/0042-207x(91)90094-y" @default.
- W2028304023 hasPublicationYear "1991" @default.
- W2028304023 type Work @default.
- W2028304023 sameAs 2028304023 @default.
- W2028304023 citedByCount "14" @default.
- W2028304023 countsByYear W20283040232013 @default.
- W2028304023 countsByYear W20283040232017 @default.
- W2028304023 countsByYear W20283040232019 @default.
- W2028304023 crossrefType "journal-article" @default.
- W2028304023 hasAuthorship W2028304023A5026097248 @default.
- W2028304023 hasAuthorship W2028304023A5041471351 @default.
- W2028304023 hasAuthorship W2028304023A5053510161 @default.
- W2028304023 hasAuthorship W2028304023A5083569509 @default.
- W2028304023 hasAuthorship W2028304023A5091794842 @default.
- W2028304023 hasConcept C100460472 @default.
- W2028304023 hasConcept C107187091 @default.
- W2028304023 hasConcept C120665830 @default.
- W2028304023 hasConcept C121332964 @default.
- W2028304023 hasConcept C124634506 @default.
- W2028304023 hasConcept C127413603 @default.
- W2028304023 hasConcept C130472188 @default.
- W2028304023 hasConcept C155310634 @default.
- W2028304023 hasConcept C159985019 @default.
- W2028304023 hasConcept C188198153 @default.
- W2028304023 hasConcept C191486275 @default.
- W2028304023 hasConcept C192562407 @default.
- W2028304023 hasConcept C24890656 @default.
- W2028304023 hasConcept C2779227376 @default.
- W2028304023 hasConcept C49040817 @default.
- W2028304023 hasConcept C544956773 @default.
- W2028304023 hasConcept C62520636 @default.
- W2028304023 hasConcept C78336883 @default.
- W2028304023 hasConcept C78519656 @default.
- W2028304023 hasConcept C82706917 @default.
- W2028304023 hasConceptScore W2028304023C100460472 @default.
- W2028304023 hasConceptScore W2028304023C107187091 @default.
- W2028304023 hasConceptScore W2028304023C120665830 @default.
- W2028304023 hasConceptScore W2028304023C121332964 @default.
- W2028304023 hasConceptScore W2028304023C124634506 @default.
- W2028304023 hasConceptScore W2028304023C127413603 @default.
- W2028304023 hasConceptScore W2028304023C130472188 @default.
- W2028304023 hasConceptScore W2028304023C155310634 @default.
- W2028304023 hasConceptScore W2028304023C159985019 @default.
- W2028304023 hasConceptScore W2028304023C188198153 @default.
- W2028304023 hasConceptScore W2028304023C191486275 @default.
- W2028304023 hasConceptScore W2028304023C192562407 @default.
- W2028304023 hasConceptScore W2028304023C24890656 @default.
- W2028304023 hasConceptScore W2028304023C2779227376 @default.
- W2028304023 hasConceptScore W2028304023C49040817 @default.
- W2028304023 hasConceptScore W2028304023C544956773 @default.
- W2028304023 hasConceptScore W2028304023C62520636 @default.
- W2028304023 hasConceptScore W2028304023C78336883 @default.
- W2028304023 hasConceptScore W2028304023C78519656 @default.
- W2028304023 hasConceptScore W2028304023C82706917 @default.
- W2028304023 hasIssue "1-2" @default.
- W2028304023 hasLocation W20283040231 @default.
- W2028304023 hasOpenAccess W2028304023 @default.
- W2028304023 hasPrimaryLocation W20283040231 @default.
- W2028304023 hasRelatedWork W1982968323 @default.
- W2028304023 hasRelatedWork W2000486822 @default.
- W2028304023 hasRelatedWork W2044877603 @default.
- W2028304023 hasRelatedWork W2057111535 @default.
- W2028304023 hasRelatedWork W2086753183 @default.
- W2028304023 hasRelatedWork W2121275838 @default.
- W2028304023 hasRelatedWork W2127217117 @default.
- W2028304023 hasRelatedWork W2164353131 @default.
- W2028304023 hasRelatedWork W2393014412 @default.
- W2028304023 hasRelatedWork W2748603911 @default.
- W2028304023 hasVolume "42" @default.
- W2028304023 isParatext "false" @default.
- W2028304023 isRetracted "false" @default.
- W2028304023 magId "2028304023" @default.
- W2028304023 workType "article" @default.