FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028379218> ?p ?o ?g. }

• W2028379218 endingPage "084316" @default.
• W2028379218 startingPage "084316" @default.
• W2028379218 abstract "On nanoscale laminate structures, the interface cannot be identified any longer as the separation between two films of bulk materials. The formation of the interface defines the final composition and structure of the laminate structure. As such, the characterization of the interface becomes an important challenge. In this work the nanoscale laminate structures were formed by atomic layer deposition (ALD) of tungsten nitride carbide and tantalum nitride thin films on dense dielectrics [silicon carbide and silicon oxide (SiO2)]. The laminates were studied using x-ray reflectivity. The starting substrate surface is a primary factor in determining the density of the ALD layer. Moreover, in some cases, electron-density perturbations are observed in the vicinity of the interfacial region. A characterization strategy, using a density contrast layer between the silicon substrate and the SiO2 dielectric is presented. Depending on the chemical nature of precursors and substrate, ALD processes can either form specific interfacial organization or induce dielectric modifications, in any case, leading to unexpected metal-dielectric interactions." @default.
• W2028379218 created "2016-06-24" @default.
• W2028379218 creator A5001065266 @default.
• W2028379218 creator A5005856665 @default.
• W2028379218 creator A5016839480 @default.
• W2028379218 creator A5041034055 @default.
• W2028379218 creator A5048424513 @default.
• W2028379218 creator A5056577874 @default.
• W2028379218 creator A5067040566 @default.
• W2028379218 creator A5073852821 @default.
• W2028379218 date "2005-04-15" @default.
• W2028379218 modified "2023-10-01" @default.
• W2028379218 title "Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity" @default.
• W2028379218 cites W1532595017 @default.
• W2028379218 cites W1579193438 @default.
• W2028379218 cites W1977102052 @default.
• W2028379218 cites W1996407699 @default.
• W2028379218 cites W1997711299 @default.
• W2028379218 cites W2001865592 @default.
• W2028379218 cites W2014968050 @default.
• W2028379218 cites W2019934385 @default.
• W2028379218 cites W2038976389 @default.
• W2028379218 cites W2057473463 @default.
• W2028379218 cites W2060447608 @default.
• W2028379218 cites W2062519897 @default.
• W2028379218 cites W2063268047 @default.
• W2028379218 cites W2070653146 @default.
• W2028379218 cites W2084668100 @default.
• W2028379218 cites W2086529087 @default.
• W2028379218 cites W2095395945 @default.
• W2028379218 cites W2096608967 @default.
• W2028379218 cites W2144768486 @default.
• W2028379218 doi "https://doi.org/10.1063/1.1874301" @default.
• W2028379218 hasPublicationYear "2005" @default.
• W2028379218 type Work @default.
• W2028379218 sameAs 2028379218 @default.
• W2028379218 citedByCount "18" @default.
• W2028379218 countsByYear W20283792182012 @default.
• W2028379218 countsByYear W20283792182013 @default.
• W2028379218 countsByYear W20283792182021 @default.
• W2028379218 crossrefType "journal-article" @default.
• W2028379218 hasAuthorship W2028379218A5001065266 @default.
• W2028379218 hasAuthorship W2028379218A5005856665 @default.
• W2028379218 hasAuthorship W2028379218A5016839480 @default.
• W2028379218 hasAuthorship W2028379218A5041034055 @default.
• W2028379218 hasAuthorship W2028379218A5048424513 @default.
• W2028379218 hasAuthorship W2028379218A5056577874 @default.
• W2028379218 hasAuthorship W2028379218A5067040566 @default.
• W2028379218 hasAuthorship W2028379218A5073852821 @default.
• W2028379218 hasConcept C111368507 @default.
• W2028379218 hasConcept C127313418 @default.
• W2028379218 hasConcept C133386390 @default.
• W2028379218 hasConcept C159985019 @default.
• W2028379218 hasConcept C171250308 @default.
• W2028379218 hasConcept C19067145 @default.
• W2028379218 hasConcept C191897082 @default.
• W2028379218 hasConcept C192562407 @default.
• W2028379218 hasConcept C194760766 @default.
• W2028379218 hasConcept C2777289219 @default.
• W2028379218 hasConcept C2777431650 @default.
• W2028379218 hasConcept C2778112282 @default.
• W2028379218 hasConcept C2779105228 @default.
• W2028379218 hasConcept C2779227376 @default.
• W2028379218 hasConcept C2779851234 @default.
• W2028379218 hasConcept C2780722187 @default.
• W2028379218 hasConcept C2780841128 @default.
• W2028379218 hasConcept C45206210 @default.
• W2028379218 hasConcept C49040817 @default.
• W2028379218 hasConcept C542268612 @default.
• W2028379218 hasConcept C544956773 @default.
• W2028379218 hasConcept C55148256 @default.
• W2028379218 hasConcept C69544855 @default.
• W2028379218 hasConceptScore W2028379218C111368507 @default.
• W2028379218 hasConceptScore W2028379218C127313418 @default.
• W2028379218 hasConceptScore W2028379218C133386390 @default.
• W2028379218 hasConceptScore W2028379218C159985019 @default.
• W2028379218 hasConceptScore W2028379218C171250308 @default.
• W2028379218 hasConceptScore W2028379218C19067145 @default.
• W2028379218 hasConceptScore W2028379218C191897082 @default.
• W2028379218 hasConceptScore W2028379218C192562407 @default.
• W2028379218 hasConceptScore W2028379218C194760766 @default.
• W2028379218 hasConceptScore W2028379218C2777289219 @default.
• W2028379218 hasConceptScore W2028379218C2777431650 @default.
• W2028379218 hasConceptScore W2028379218C2778112282 @default.
• W2028379218 hasConceptScore W2028379218C2779105228 @default.
• W2028379218 hasConceptScore W2028379218C2779227376 @default.
• W2028379218 hasConceptScore W2028379218C2779851234 @default.
• W2028379218 hasConceptScore W2028379218C2780722187 @default.
• W2028379218 hasConceptScore W2028379218C2780841128 @default.
• W2028379218 hasConceptScore W2028379218C45206210 @default.
• W2028379218 hasConceptScore W2028379218C49040817 @default.
• W2028379218 hasConceptScore W2028379218C542268612 @default.
• W2028379218 hasConceptScore W2028379218C544956773 @default.
• W2028379218 hasConceptScore W2028379218C55148256 @default.
• W2028379218 hasConceptScore W2028379218C69544855 @default.
• W2028379218 hasIssue "8" @default.
• W2028379218 hasLocation W20283792181 @default.
• W2028379218 hasOpenAccess W2028379218 @default.

• next