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• W2028397048 endingPage "492" @default.
• W2028397048 startingPage "483" @default.
• W2028397048 abstract "A system for surface analysis, lattice localisation of impurities, defect studies in crystalline solids and routine ERD (elastic recoil detection) is described. The apparatus features a high vacuum chamber, a computer controlled precision goniometer and an energy plus time-of-flight mass discrimination system. First results of channeling/ERD experiments using 15–30 MeV 35Cl beams on silicon crystals implanted with B+ and BF2+ are presented, as well as data on the effect of beam induced damage on the boron distribution." @default.
• W2028397048 created "2016-06-24" @default.
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• W2028397048 date "1988-10-01" @default.
• W2028397048 modified "2023-10-14" @default.
• W2028397048 title "An ERD/RBS/PIXE apparatus for surface analysis and channeling" @default.
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• W2028397048 doi "https://doi.org/10.1016/0168-583x(88)90155-3" @default.
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