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- W2028419367 abstract "Microbridge samples of length 134–368 µm and width 20 µm, composed of a Cr film of 150 nm thickness sputter-deposited on a silicon substrate, were fabricated by the MEMS (microelectromechanical systems) technique. The profile of 'buckled' beams was measured by the white light interference technique and only the middle and the boundary of the beams are shown in the results. From the length and amplitude, the full profile of the beams was fitted and residual strain in the film was deduced. The fitted results correspond well with the experimental results and the residual strain is about 5.826 × 10−3." @default.
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- W2028419367 date "2007-09-27" @default.
- W2028419367 modified "2023-09-26" @default.
- W2028419367 title "Residual strain of a Cr film characterized by micromachined beams" @default.
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- W2028419367 doi "https://doi.org/10.1088/0957-0233/18/11/020" @default.
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