Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028428064> ?p ?o ?g. }
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91
with 100 items per page.
- W2028428064 endingPage "L567" @default.
- W2028428064 startingPage "L567" @default.
- W2028428064 abstract "The influence of power-source frequency on the film properties of glow-discharge (GD) amorphous silicon has been studied in the range from 10 kHz to 50 MHz. Mechanical property, rather than photoelectric properties of the film, is highly influenced by the frequency, i.e., compressive internal stress is stored in the film when deposited from SiH 4 plasma operated by a frequency lower than 500 kHz. It has been demonstrated through mass spectrometric measurements that the internal stress is caused by ion bombardment on the growing surface of the film." @default.
- W2028428064 created "2016-06-24" @default.
- W2028428064 creator A5005997243 @default.
- W2028428064 creator A5023370324 @default.
- W2028428064 creator A5033335632 @default.
- W2028428064 creator A5040511674 @default.
- W2028428064 date "1984-08-01" @default.
- W2028428064 modified "2023-09-25" @default.
- W2028428064 title "Influence of Power-Source Frequency on the Properties of GD a-Si:H" @default.
- W2028428064 cites W2003853955 @default.
- W2028428064 cites W2004010097 @default.
- W2028428064 cites W2054881253 @default.
- W2028428064 cites W2090746651 @default.
- W2028428064 cites W2158799497 @default.
- W2028428064 cites W2934536958 @default.
- W2028428064 doi "https://doi.org/10.1143/jjap.23.l567" @default.
- W2028428064 hasPublicationYear "1984" @default.
- W2028428064 type Work @default.
- W2028428064 sameAs 2028428064 @default.
- W2028428064 citedByCount "27" @default.
- W2028428064 countsByYear W20284280642019 @default.
- W2028428064 crossrefType "journal-article" @default.
- W2028428064 hasAuthorship W2028428064A5005997243 @default.
- W2028428064 hasAuthorship W2028428064A5023370324 @default.
- W2028428064 hasAuthorship W2028428064A5033335632 @default.
- W2028428064 hasAuthorship W2028428064A5040511674 @default.
- W2028428064 hasConcept C113196181 @default.
- W2028428064 hasConcept C121332964 @default.
- W2028428064 hasConcept C138885662 @default.
- W2028428064 hasConcept C145148216 @default.
- W2028428064 hasConcept C159985019 @default.
- W2028428064 hasConcept C178790620 @default.
- W2028428064 hasConcept C185592680 @default.
- W2028428064 hasConcept C192562407 @default.
- W2028428064 hasConcept C204323151 @default.
- W2028428064 hasConcept C21036866 @default.
- W2028428064 hasConcept C2776390347 @default.
- W2028428064 hasConcept C2776595061 @default.
- W2028428064 hasConcept C2779667780 @default.
- W2028428064 hasConcept C41895202 @default.
- W2028428064 hasConcept C43617362 @default.
- W2028428064 hasConcept C49040817 @default.
- W2028428064 hasConcept C544956773 @default.
- W2028428064 hasConcept C56052488 @default.
- W2028428064 hasConcept C62520636 @default.
- W2028428064 hasConcept C71570822 @default.
- W2028428064 hasConcept C8010536 @default.
- W2028428064 hasConcept C82706917 @default.
- W2028428064 hasConceptScore W2028428064C113196181 @default.
- W2028428064 hasConceptScore W2028428064C121332964 @default.
- W2028428064 hasConceptScore W2028428064C138885662 @default.
- W2028428064 hasConceptScore W2028428064C145148216 @default.
- W2028428064 hasConceptScore W2028428064C159985019 @default.
- W2028428064 hasConceptScore W2028428064C178790620 @default.
- W2028428064 hasConceptScore W2028428064C185592680 @default.
- W2028428064 hasConceptScore W2028428064C192562407 @default.
- W2028428064 hasConceptScore W2028428064C204323151 @default.
- W2028428064 hasConceptScore W2028428064C21036866 @default.
- W2028428064 hasConceptScore W2028428064C2776390347 @default.
- W2028428064 hasConceptScore W2028428064C2776595061 @default.
- W2028428064 hasConceptScore W2028428064C2779667780 @default.
- W2028428064 hasConceptScore W2028428064C41895202 @default.
- W2028428064 hasConceptScore W2028428064C43617362 @default.
- W2028428064 hasConceptScore W2028428064C49040817 @default.
- W2028428064 hasConceptScore W2028428064C544956773 @default.
- W2028428064 hasConceptScore W2028428064C56052488 @default.
- W2028428064 hasConceptScore W2028428064C62520636 @default.
- W2028428064 hasConceptScore W2028428064C71570822 @default.
- W2028428064 hasConceptScore W2028428064C8010536 @default.
- W2028428064 hasConceptScore W2028428064C82706917 @default.
- W2028428064 hasIssue "8A" @default.
- W2028428064 hasLocation W20284280641 @default.
- W2028428064 hasOpenAccess W2028428064 @default.
- W2028428064 hasPrimaryLocation W20284280641 @default.
- W2028428064 hasRelatedWork W1999860072 @default.
- W2028428064 hasRelatedWork W2009819460 @default.
- W2028428064 hasRelatedWork W2031863075 @default.
- W2028428064 hasRelatedWork W2053735234 @default.
- W2028428064 hasRelatedWork W2061728122 @default.
- W2028428064 hasRelatedWork W2083321254 @default.
- W2028428064 hasRelatedWork W2089633568 @default.
- W2028428064 hasRelatedWork W2090852288 @default.
- W2028428064 hasRelatedWork W2095015337 @default.
- W2028428064 hasRelatedWork W2129859591 @default.
- W2028428064 hasVolume "23" @default.
- W2028428064 isParatext "false" @default.
- W2028428064 isRetracted "false" @default.
- W2028428064 magId "2028428064" @default.
- W2028428064 workType "article" @default.