FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028441195> ?p ?o ?g. }

• W2028441195 abstract "Distributions of plasma parameters, such as electron temperature and electron density have been studied for large-volume processing. In terms of precise study of large-volume plasma, ion-species distributions in plasma should be measured as well as those of plasma parameters. However, no method to measure the spatial distributions of ion species has been developed so far. In this study, we construct a new apparatus to measure the ion-species distribution by using a quadrupole mass spectrometer, which can be moved in vacuum perpendicularly to the beam extraction. Furthermore, we propose a new method to generate uniform plasma by introducing gas in pulse and generate pulsed plasma correspondently with the gas introduction. The results suggest that the ion-species distributions are not consistent with the electron-density distribution and spatial distributions of ion species can be improved by introducing gas in pulse and generating pulsed plasma. For further study towards the next-generation semiconductor fabrication, the ion-species distributions in large-volume plasma should be taken into account as well as those of the other plasma parameters." @default.
• W2028441195 created "2016-06-24" @default.
• W2028441195 creator A5001519066 @default.
• W2028441195 creator A5001762466 @default.
• W2028441195 creator A5008025603 @default.
• W2028441195 creator A5011217966 @default.
• W2028441195 creator A5012389486 @default.
• W2028441195 creator A5017558291 @default.
• W2028441195 creator A5033466476 @default.
• W2028441195 creator A5034505216 @default.
• W2028441195 creator A5044230238 @default.
• W2028441195 creator A5046537458 @default.
• W2028441195 creator A5048079278 @default.
• W2028441195 creator A5083475266 @default.
• W2028441195 date "2001-02-01" @default.
• W2028441195 modified "2023-09-26" @default.
• W2028441195 title "Spatial distributions of ion-species in a large-volume inductively coupled plasma source" @default.
• W2028441195 cites W1969355451 @default.
• W2028441195 cites W1974468574 @default.
• W2028441195 cites W2066365362 @default.
• W2028441195 cites W2069128599 @default.
• W2028441195 doi "https://doi.org/10.1016/s0257-8972(00)01036-7" @default.
• W2028441195 hasPublicationYear "2001" @default.
• W2028441195 type Work @default.
• W2028441195 sameAs 2028441195 @default.
• W2028441195 citedByCount "5" @default.
• W2028441195 crossrefType "journal-article" @default.
• W2028441195 hasAuthorship W2028441195A5001519066 @default.
• W2028441195 hasAuthorship W2028441195A5001762466 @default.
• W2028441195 hasAuthorship W2028441195A5008025603 @default.
• W2028441195 hasAuthorship W2028441195A5011217966 @default.
• W2028441195 hasAuthorship W2028441195A5012389486 @default.
• W2028441195 hasAuthorship W2028441195A5017558291 @default.
• W2028441195 hasAuthorship W2028441195A5033466476 @default.
• W2028441195 hasAuthorship W2028441195A5034505216 @default.
• W2028441195 hasAuthorship W2028441195A5044230238 @default.
• W2028441195 hasAuthorship W2028441195A5046537458 @default.
• W2028441195 hasAuthorship W2028441195A5048079278 @default.
• W2028441195 hasAuthorship W2028441195A5083475266 @default.
• W2028441195 hasConcept C103232671 @default.
• W2028441195 hasConcept C121332964 @default.
• W2028441195 hasConcept C125485243 @default.
• W2028441195 hasConcept C145148216 @default.
• W2028441195 hasConcept C145738678 @default.
• W2028441195 hasConcept C162356407 @default.
• W2028441195 hasConcept C184779094 @default.
• W2028441195 hasConcept C185544564 @default.
• W2028441195 hasConcept C188224857 @default.
• W2028441195 hasConcept C192039680 @default.
• W2028441195 hasConcept C192562407 @default.
• W2028441195 hasConcept C20556612 @default.
• W2028441195 hasConcept C22175881 @default.
• W2028441195 hasConcept C39984356 @default.
• W2028441195 hasConcept C43503373 @default.
• W2028441195 hasConcept C62520636 @default.
• W2028441195 hasConcept C82706917 @default.
• W2028441195 hasConcept C95974651 @default.
• W2028441195 hasConceptScore W2028441195C103232671 @default.
• W2028441195 hasConceptScore W2028441195C121332964 @default.
• W2028441195 hasConceptScore W2028441195C125485243 @default.
• W2028441195 hasConceptScore W2028441195C145148216 @default.
• W2028441195 hasConceptScore W2028441195C145738678 @default.
• W2028441195 hasConceptScore W2028441195C162356407 @default.
• W2028441195 hasConceptScore W2028441195C184779094 @default.
• W2028441195 hasConceptScore W2028441195C185544564 @default.
• W2028441195 hasConceptScore W2028441195C188224857 @default.
• W2028441195 hasConceptScore W2028441195C192039680 @default.
• W2028441195 hasConceptScore W2028441195C192562407 @default.
• W2028441195 hasConceptScore W2028441195C20556612 @default.
• W2028441195 hasConceptScore W2028441195C22175881 @default.
• W2028441195 hasConceptScore W2028441195C39984356 @default.
• W2028441195 hasConceptScore W2028441195C43503373 @default.
• W2028441195 hasConceptScore W2028441195C62520636 @default.
• W2028441195 hasConceptScore W2028441195C82706917 @default.
• W2028441195 hasConceptScore W2028441195C95974651 @default.
• W2028441195 hasLocation W20284411951 @default.
• W2028441195 hasOpenAccess W2028441195 @default.
• W2028441195 hasPrimaryLocation W20284411951 @default.
• W2028441195 hasRelatedWork W1527353477 @default.
• W2028441195 hasRelatedWork W1545933774 @default.
• W2028441195 hasRelatedWork W1557045295 @default.
• W2028441195 hasRelatedWork W1976791655 @default.
• W2028441195 hasRelatedWork W1981778308 @default.
• W2028441195 hasRelatedWork W1996106445 @default.
• W2028441195 hasRelatedWork W1999066460 @default.
• W2028441195 hasRelatedWork W2015758358 @default.
• W2028441195 hasRelatedWork W2027341787 @default.
• W2028441195 hasRelatedWork W2030704149 @default.
• W2028441195 hasRelatedWork W2057438455 @default.
• W2028441195 hasRelatedWork W2102551471 @default.
• W2028441195 hasRelatedWork W2114363320 @default.
• W2028441195 hasRelatedWork W2128336026 @default.
• W2028441195 hasRelatedWork W2129241273 @default.
• W2028441195 hasRelatedWork W2129853958 @default.
• W2028441195 hasRelatedWork W2146154454 @default.
• W2028441195 hasRelatedWork W2383507929 @default.
• W2028441195 hasRelatedWork W2601180423 @default.
• W2028441195 hasRelatedWork W61710193 @default.
• W2028441195 isParatext "false" @default.
• W2028441195 isRetracted "false" @default.

• next