Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028544186> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2028544186 endingPage "7839" @default.
- W2028544186 startingPage "7839" @default.
- W2028544186 abstract "The surface texturing method for crystalline Si using hydrogen radicals generated by a tungsten hot filament was developed. We found that tungsten particles supplied from a tungsten filament work as an etching mask against hydrogen radicals. The surface morphology and feature size of the texture structure could be controlled by the particle deposition condition on the Si(100) surface. An inverted pyramid structure was obtained when the particle density was high, suggesting that the etching reaction induced by hydrogen radicals is anisotropic. The reflectance spectra of hydrogen-treated Si surface using this method showed a very low surface reflectance of less than 1% in the range from 200 to 900 nm without any antireflection coatings. The particles on the silicon surface can easily be removed using HF+HNO 3 solution. This method is also effective for the texturing of Si(111) wafer, having a potential for the texturing of multicrystalline silicon." @default.
- W2028544186 created "2016-06-24" @default.
- W2028544186 creator A5007072522 @default.
- W2028544186 creator A5049054004 @default.
- W2028544186 creator A5070298147 @default.
- W2028544186 creator A5083805602 @default.
- W2028544186 date "2005-11-01" @default.
- W2028544186 modified "2023-09-27" @default.
- W2028544186 title "Surface Texturing of Silicon by Hydrogen Radicals" @default.
- W2028544186 cites W1967890888 @default.
- W2028544186 cites W1970465845 @default.
- W2028544186 cites W2004465229 @default.
- W2028544186 cites W2023340302 @default.
- W2028544186 cites W2043360348 @default.
- W2028544186 cites W2043468754 @default.
- W2028544186 cites W2044965702 @default.
- W2028544186 cites W2066338103 @default.
- W2028544186 cites W2935748481 @default.
- W2028544186 doi "https://doi.org/10.1143/jjap.44.7839" @default.
- W2028544186 hasPublicationYear "2005" @default.
- W2028544186 type Work @default.
- W2028544186 sameAs 2028544186 @default.
- W2028544186 citedByCount "18" @default.
- W2028544186 countsByYear W20285441862012 @default.
- W2028544186 countsByYear W20285441862013 @default.
- W2028544186 countsByYear W20285441862014 @default.
- W2028544186 countsByYear W20285441862015 @default.
- W2028544186 countsByYear W20285441862017 @default.
- W2028544186 countsByYear W20285441862018 @default.
- W2028544186 crossrefType "journal-article" @default.
- W2028544186 hasAuthorship W2028544186A5007072522 @default.
- W2028544186 hasAuthorship W2028544186A5049054004 @default.
- W2028544186 hasAuthorship W2028544186A5070298147 @default.
- W2028544186 hasAuthorship W2028544186A5083805602 @default.
- W2028544186 hasConcept C100460472 @default.
- W2028544186 hasConcept C111368507 @default.
- W2028544186 hasConcept C127313418 @default.
- W2028544186 hasConcept C139066938 @default.
- W2028544186 hasConcept C160671074 @default.
- W2028544186 hasConcept C171250308 @default.
- W2028544186 hasConcept C178790620 @default.
- W2028544186 hasConcept C185592680 @default.
- W2028544186 hasConcept C191897082 @default.
- W2028544186 hasConcept C192562407 @default.
- W2028544186 hasConcept C2778517922 @default.
- W2028544186 hasConcept C2779227376 @default.
- W2028544186 hasConcept C2779667780 @default.
- W2028544186 hasConcept C49040817 @default.
- W2028544186 hasConcept C512968161 @default.
- W2028544186 hasConcept C542268612 @default.
- W2028544186 hasConcept C544956773 @default.
- W2028544186 hasConceptScore W2028544186C100460472 @default.
- W2028544186 hasConceptScore W2028544186C111368507 @default.
- W2028544186 hasConceptScore W2028544186C127313418 @default.
- W2028544186 hasConceptScore W2028544186C139066938 @default.
- W2028544186 hasConceptScore W2028544186C160671074 @default.
- W2028544186 hasConceptScore W2028544186C171250308 @default.
- W2028544186 hasConceptScore W2028544186C178790620 @default.
- W2028544186 hasConceptScore W2028544186C185592680 @default.
- W2028544186 hasConceptScore W2028544186C191897082 @default.
- W2028544186 hasConceptScore W2028544186C192562407 @default.
- W2028544186 hasConceptScore W2028544186C2778517922 @default.
- W2028544186 hasConceptScore W2028544186C2779227376 @default.
- W2028544186 hasConceptScore W2028544186C2779667780 @default.
- W2028544186 hasConceptScore W2028544186C49040817 @default.
- W2028544186 hasConceptScore W2028544186C512968161 @default.
- W2028544186 hasConceptScore W2028544186C542268612 @default.
- W2028544186 hasConceptScore W2028544186C544956773 @default.
- W2028544186 hasIssue "11R" @default.
- W2028544186 hasLocation W20285441861 @default.
- W2028544186 hasOpenAccess W2028544186 @default.
- W2028544186 hasPrimaryLocation W20285441861 @default.
- W2028544186 hasRelatedWork W1965834868 @default.
- W2028544186 hasRelatedWork W2004589872 @default.
- W2028544186 hasRelatedWork W2064807885 @default.
- W2028544186 hasRelatedWork W2085733736 @default.
- W2028544186 hasRelatedWork W2161019696 @default.
- W2028544186 hasRelatedWork W2375074881 @default.
- W2028544186 hasRelatedWork W2559327081 @default.
- W2028544186 hasRelatedWork W2588379601 @default.
- W2028544186 hasRelatedWork W3135216591 @default.
- W2028544186 hasRelatedWork W2095184797 @default.
- W2028544186 hasVolume "44" @default.
- W2028544186 isParatext "false" @default.
- W2028544186 isRetracted "false" @default.
- W2028544186 magId "2028544186" @default.
- W2028544186 workType "article" @default.