Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028576602> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2028576602 endingPage "249" @default.
- W2028576602 startingPage "247" @default.
- W2028576602 abstract "Based on numerical device and process simulation, it is shown that enhancement of the boron diffusivity by as much as 300 times in the thin gate oxide results in a very shallow exponential p-type profile in the underlying silicon substrate. The effect of fluorine and phosphorus coimplantation into the p-type polysilicon gate is modeled by changes in the boron diffusivity in the gate oxide and segregation at the polysilicon-oxide interface. An inverse PMOS short-channel behavior in which the threshold voltage becomes more negative with decreasing channel length is modeled by two-dimensional boron segregation effects caused by the poly gate oxidation.< <ETX xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>></ETX>" @default.
- W2028576602 created "2016-06-24" @default.
- W2028576602 creator A5014728657 @default.
- W2028576602 creator A5054113881 @default.
- W2028576602 creator A5076221320 @default.
- W2028576602 date "1990-06-01" @default.
- W2028576602 modified "2023-09-23" @default.
- W2028576602 title "A physical model for boron penetration through thin gate oxides from p/sup +/ polysilicon gates" @default.
- W2028576602 cites W1982584359 @default.
- W2028576602 cites W2045687023 @default.
- W2028576602 cites W2078789051 @default.
- W2028576602 doi "https://doi.org/10.1109/55.55269" @default.
- W2028576602 hasPublicationYear "1990" @default.
- W2028576602 type Work @default.
- W2028576602 sameAs 2028576602 @default.
- W2028576602 citedByCount "51" @default.
- W2028576602 countsByYear W20285766022015 @default.
- W2028576602 countsByYear W20285766022019 @default.
- W2028576602 crossrefType "journal-article" @default.
- W2028576602 hasAuthorship W2028576602A5014728657 @default.
- W2028576602 hasAuthorship W2028576602A5054113881 @default.
- W2028576602 hasAuthorship W2028576602A5076221320 @default.
- W2028576602 hasConcept C111368507 @default.
- W2028576602 hasConcept C119599485 @default.
- W2028576602 hasConcept C121332964 @default.
- W2028576602 hasConcept C127313418 @default.
- W2028576602 hasConcept C127413603 @default.
- W2028576602 hasConcept C152909973 @default.
- W2028576602 hasConcept C165801399 @default.
- W2028576602 hasConcept C172385210 @default.
- W2028576602 hasConcept C178790620 @default.
- W2028576602 hasConcept C185592680 @default.
- W2028576602 hasConcept C191897082 @default.
- W2028576602 hasConcept C192562407 @default.
- W2028576602 hasConcept C195370968 @default.
- W2028576602 hasConcept C2361726 @default.
- W2028576602 hasConcept C24326235 @default.
- W2028576602 hasConcept C25356406 @default.
- W2028576602 hasConcept C27050352 @default.
- W2028576602 hasConcept C2777289219 @default.
- W2028576602 hasConcept C2779851234 @default.
- W2028576602 hasConcept C37668627 @default.
- W2028576602 hasConcept C49040817 @default.
- W2028576602 hasConcept C501308230 @default.
- W2028576602 hasConcept C544956773 @default.
- W2028576602 hasConcept C62520636 @default.
- W2028576602 hasConcept C72832162 @default.
- W2028576602 hasConceptScore W2028576602C111368507 @default.
- W2028576602 hasConceptScore W2028576602C119599485 @default.
- W2028576602 hasConceptScore W2028576602C121332964 @default.
- W2028576602 hasConceptScore W2028576602C127313418 @default.
- W2028576602 hasConceptScore W2028576602C127413603 @default.
- W2028576602 hasConceptScore W2028576602C152909973 @default.
- W2028576602 hasConceptScore W2028576602C165801399 @default.
- W2028576602 hasConceptScore W2028576602C172385210 @default.
- W2028576602 hasConceptScore W2028576602C178790620 @default.
- W2028576602 hasConceptScore W2028576602C185592680 @default.
- W2028576602 hasConceptScore W2028576602C191897082 @default.
- W2028576602 hasConceptScore W2028576602C192562407 @default.
- W2028576602 hasConceptScore W2028576602C195370968 @default.
- W2028576602 hasConceptScore W2028576602C2361726 @default.
- W2028576602 hasConceptScore W2028576602C24326235 @default.
- W2028576602 hasConceptScore W2028576602C25356406 @default.
- W2028576602 hasConceptScore W2028576602C27050352 @default.
- W2028576602 hasConceptScore W2028576602C2777289219 @default.
- W2028576602 hasConceptScore W2028576602C2779851234 @default.
- W2028576602 hasConceptScore W2028576602C37668627 @default.
- W2028576602 hasConceptScore W2028576602C49040817 @default.
- W2028576602 hasConceptScore W2028576602C501308230 @default.
- W2028576602 hasConceptScore W2028576602C544956773 @default.
- W2028576602 hasConceptScore W2028576602C62520636 @default.
- W2028576602 hasConceptScore W2028576602C72832162 @default.
- W2028576602 hasIssue "6" @default.
- W2028576602 hasLocation W20285766021 @default.
- W2028576602 hasOpenAccess W2028576602 @default.
- W2028576602 hasPrimaryLocation W20285766021 @default.
- W2028576602 hasRelatedWork W1538086813 @default.
- W2028576602 hasRelatedWork W1605799167 @default.
- W2028576602 hasRelatedWork W1954343641 @default.
- W2028576602 hasRelatedWork W2001994306 @default.
- W2028576602 hasRelatedWork W2024902452 @default.
- W2028576602 hasRelatedWork W2028576602 @default.
- W2028576602 hasRelatedWork W2045474182 @default.
- W2028576602 hasRelatedWork W2103916209 @default.
- W2028576602 hasRelatedWork W2114842981 @default.
- W2028576602 hasRelatedWork W2165689927 @default.
- W2028576602 hasVolume "11" @default.
- W2028576602 isParatext "false" @default.
- W2028576602 isRetracted "false" @default.
- W2028576602 magId "2028576602" @default.
- W2028576602 workType "article" @default.