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- W2028638071 abstract "A method to evaluate capacitance based on parameter extraction from finite-element analysis as well as a global model for a novel silicon microfabricated accelerometer are presented. Mechanical simulations have been performed and results are coupled with the capacitance-evaluation method to compute the static and dynamic response of the accelerometer. Using both mechanical data and capacitance data, a global model for the accelerometer is generated with models written in Hardware Description Language for Analogue device (HDL-A™). An improvement of the capacitive displacement detection technique is obtained." @default.
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- W2028638071 date "1998-05-01" @default.
- W2028638071 modified "2023-10-17" @default.
- W2028638071 title "Global model generation for a capacitive silicon accelerometer by finite-element analysis" @default.
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- W2028638071 doi "https://doi.org/10.1016/s0924-4247(98)00011-9" @default.
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