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• W2028671611 abstract "In-plane unstrained single-c-domain/single-crystal thin films of PZT-based ternary ferroelectric perovskite, xPb(Mn,Nb)O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> -(1 - x)PZT, were grown on SrRuO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> /Pt/MgO substrates using magnetron sputtering followed by quenching. The sputtered unstrained thin films exhibit unique ferroelectric properties: high coercive field, E <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</sub> >; 180 kV/cm, large remanent polarization, P <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>r</sub> = 100 μC/cm <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> , small relative dielectric constants, ε* = 100 to 150, high Curie temperature, T <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>c</sub> = ~600°C, and bulk-like large transverse piezoelectric constants, e <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>31,f</sub> = -12.0 C/m <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sup> for PZT(48/52) at x = 0.06. The unstrained thin films are an ideal structure to extract the bulk ferroelectric properties. Their micro-structures and ferroelectric properties are discussed in relation to the potential applications for piezoelectric MEMS." @default.
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• W2028671611 date "2012-01-01" @default.
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• W2028671611 title "Highly polarized single-c-domain single-crystal Pb(Mn,Nb)O3-PZT thin films" @default.
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• W2028671611 doi "https://doi.org/10.1109/tuffc.2012.2150" @default.
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