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- W2028683310 abstract "Sharp, silicon tips have been fabricated with a height and spacing of 3 um. They were arranged as single tips, groups and large arrays. The fabrication processes were chosen to allow a very high degree of tip uniformity to be achieved. After coating with various refractory metals the field emitting properties of the coated tips have been investigated in an UHV chamber employing a measurement procedure involving the use of an accurately positionable anode located above the microtips." @default.
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- W2028683310 date "1991-03-01" @default.
- W2028683310 modified "2023-09-26" @default.
- W2028683310 title "Microfabrication of metal-coated silicon tips and their field emission properties" @default.
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- W2028683310 doi "https://doi.org/10.1016/0167-9317(91)90142-z" @default.
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