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• W2028777488 abstract "Mechanical parameters, especially mechanical stress of membranes used in silicon microphones strongly dependon the manufacturing process. As a result, deviations during this process can result in sensitivity variationsof the microphone. Therefore, the stress should be well controlled within a certain tensile level. This paperdescribes a method to test devices electrically using the MEMS related pull-in phenomenon with respect to themechanical compliance of microphone membranes. Using this method, out of specification chips can be detectedat an early stage within the manufacturing process instead of determination at a system functionality test afterpackaging. Therefore, the adequacy for the intended use of the pull-in voltage and its dependency on varyingtensile stress due to manufacturing tolerance is evaluated." @default.
• W2028777488 created "2016-06-24" @default.
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• W2028777488 date "2013-05-17" @default.
• W2028777488 modified "2023-09-23" @default.
• W2028777488 title "A large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-In voltage" @default.
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• W2028777488 doi "https://doi.org/10.1117/12.2016835" @default.
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