FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028803173> ?p ?o ?g. }

• W2028803173 abstract "In this paper, the electric field induced deformations of sputter-deposited piezoelectric aluminum nitride thin films sandwiched between electrodes on top of a silicon substrate are studied by numerical calculations and scanning laser interferometric measurements. In our calculations based on the finite element method, the results show the displacement of the top and bottom surfaces of both the thin film and the substrate, for either a free or a perfectly clamped structure. The confirmation that the bottom surface of the film is deformed reveals the limitations of techniques that only access the top surface, as well as the double-beam interferometric configuration, under specific conditions. In addition, the simulations demonstrate the dependence of the displacements on the size of the upper electrode and the contribution of the transverse piezoelectric coefficient d31 to the features of the displacement profiles. A laser scanning vibrometry technique was used to measure deformations on the top surface with subpicometer vertical resolution. By comparing the calculated and the experimental displacement profiles, an advanced approach is discussed to obtain accurate quantitative information of both coefficients d31 and d33." @default.
• W2028803173 created "2016-06-24" @default.
• W2028803173 creator A5006249454 @default.
• W2028803173 creator A5020934002 @default.
• W2028803173 creator A5054507364 @default.
• W2028803173 creator A5064576504 @default.
• W2028803173 creator A5088495563 @default.
• W2028803173 creator A5090186090 @default.
• W2028803173 date "2008-09-01" @default.
• W2028803173 modified "2023-10-02" @default.
• W2028803173 title "Simulation and laser vibrometry characterization of piezoelectric AlN thin films" @default.
• W2028803173 cites W1973707823 @default.
• W2028803173 cites W2031460290 @default.
• W2028803173 cites W2041690766 @default.
• W2028803173 cites W2046104316 @default.
• W2028803173 cites W2050890807 @default.
• W2028803173 cites W2060964422 @default.
• W2028803173 cites W2061352219 @default.
• W2028803173 cites W2067425773 @default.
• W2028803173 cites W2070726846 @default.
• W2028803173 cites W2071119262 @default.
• W2028803173 cites W2074869505 @default.
• W2028803173 cites W2077217057 @default.
• W2028803173 cites W2079767096 @default.
• W2028803173 cites W2101741204 @default.
• W2028803173 cites W2109392366 @default.
• W2028803173 cites W2127076004 @default.
• W2028803173 cites W2138660905 @default.
• W2028803173 cites W2153057305 @default.
• W2028803173 cites W2163044715 @default.
• W2028803173 cites W2172124160 @default.
• W2028803173 doi "https://doi.org/10.1063/1.2957081" @default.
• W2028803173 hasPublicationYear "2008" @default.
• W2028803173 type Work @default.
• W2028803173 sameAs 2028803173 @default.
• W2028803173 citedByCount "42" @default.
• W2028803173 countsByYear W20288031732012 @default.
• W2028803173 countsByYear W20288031732013 @default.
• W2028803173 countsByYear W20288031732014 @default.
• W2028803173 countsByYear W20288031732015 @default.
• W2028803173 countsByYear W20288031732016 @default.
• W2028803173 countsByYear W20288031732017 @default.
• W2028803173 countsByYear W20288031732018 @default.
• W2028803173 countsByYear W20288031732019 @default.
• W2028803173 countsByYear W20288031732020 @default.
• W2028803173 countsByYear W20288031732021 @default.
• W2028803173 countsByYear W20288031732022 @default.
• W2028803173 crossrefType "journal-article" @default.
• W2028803173 hasAuthorship W2028803173A5006249454 @default.
• W2028803173 hasAuthorship W2028803173A5020934002 @default.
• W2028803173 hasAuthorship W2028803173A5054507364 @default.
• W2028803173 hasAuthorship W2028803173A5064576504 @default.
• W2028803173 hasAuthorship W2028803173A5088495563 @default.
• W2028803173 hasAuthorship W2028803173A5090186090 @default.
• W2028803173 hasBestOaLocation W20288031732 @default.
• W2028803173 hasConcept C100082104 @default.
• W2028803173 hasConcept C107551265 @default.
• W2028803173 hasConcept C111368507 @default.
• W2028803173 hasConcept C120665830 @default.
• W2028803173 hasConcept C121332964 @default.
• W2028803173 hasConcept C127313418 @default.
• W2028803173 hasConcept C135405054 @default.
• W2028803173 hasConcept C135628077 @default.
• W2028803173 hasConcept C15744967 @default.
• W2028803173 hasConcept C159985019 @default.
• W2028803173 hasConcept C166689943 @default.
• W2028803173 hasConcept C171250308 @default.
• W2028803173 hasConcept C19067145 @default.
• W2028803173 hasConcept C192562407 @default.
• W2028803173 hasConcept C22423302 @default.
• W2028803173 hasConcept C2777289219 @default.
• W2028803173 hasConcept C49040817 @default.
• W2028803173 hasConcept C520434653 @default.
• W2028803173 hasConcept C542102704 @default.
• W2028803173 hasConcept C544956773 @default.
• W2028803173 hasConcept C97355855 @default.
• W2028803173 hasConceptScore W2028803173C100082104 @default.
• W2028803173 hasConceptScore W2028803173C107551265 @default.
• W2028803173 hasConceptScore W2028803173C111368507 @default.
• W2028803173 hasConceptScore W2028803173C120665830 @default.
• W2028803173 hasConceptScore W2028803173C121332964 @default.
• W2028803173 hasConceptScore W2028803173C127313418 @default.
• W2028803173 hasConceptScore W2028803173C135405054 @default.
• W2028803173 hasConceptScore W2028803173C135628077 @default.
• W2028803173 hasConceptScore W2028803173C15744967 @default.
• W2028803173 hasConceptScore W2028803173C159985019 @default.
• W2028803173 hasConceptScore W2028803173C166689943 @default.
• W2028803173 hasConceptScore W2028803173C171250308 @default.
• W2028803173 hasConceptScore W2028803173C19067145 @default.
• W2028803173 hasConceptScore W2028803173C192562407 @default.
• W2028803173 hasConceptScore W2028803173C22423302 @default.
• W2028803173 hasConceptScore W2028803173C2777289219 @default.
• W2028803173 hasConceptScore W2028803173C49040817 @default.
• W2028803173 hasConceptScore W2028803173C520434653 @default.
• W2028803173 hasConceptScore W2028803173C542102704 @default.
• W2028803173 hasConceptScore W2028803173C544956773 @default.
• W2028803173 hasConceptScore W2028803173C97355855 @default.
• W2028803173 hasIssue "5" @default.
• W2028803173 hasLocation W20288031731 @default.
• W2028803173 hasLocation W20288031732 @default.

• next