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• W2028809239 abstract "Artefacts evolved during TEM sample preparation by ion milling are discussed. Possibilities are given to minimise the amorphization/damage of the ion milled samples. A new type of low energy ion gun is applied in the ion milling device; ion beam induced artefacts are minimised, as shown for samples of GaAs and Si." @default.
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• W2028809239 date "1999-06-01" @default.
• W2028809239 modified "2023-10-06" @default.
• W2028809239 title "TEM sample preparation by ion milling/amorphization" @default.
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• W2028809239 doi "https://doi.org/10.1016/s0968-4328(99)00011-6" @default.
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