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- W2028922011 abstract "Abstract We report the specific contact resistance at zero bias, Rc, and the barrier heights of rapidly thermally alloyed AuGe contacts on 1017 cm−3 n-GaSb. An alloying step of 1 min at about 300°C provides a minimum contact resistance of about 0.4 Ωcm2. Addition of Ni in the form of a AuNiGe process has little effect on Rc, but reduces the minimum alloying temperature to about 250°C. The further step of an added gold overlayer in the Au AuNiGe process further reduces the minimum alloying temperature to about 200°C. For contacts on 1017 cm−3 p-GaSb, TiAu proved superior in conductance compared to Ti and Cr. Alloying at 300°C slightly improved the quality of the contacts. The optimized processes provide compatible bipolar ohmic metallization for minimum thermal budget." @default.
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- W2028922011 date "1996-03-01" @default.
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- W2028922011 title "Ohmic contacts to n-type and p-type GaSb" @default.
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- W2028922011 doi "https://doi.org/10.1016/0038-1101(95)00144-1" @default.
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