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- W2028932865 abstract "The process of rapid annealing of implanted silicon wafers under non-isothermal conditions has been studied. It was established, applied temperature gradient ∇<i>T</i> gives rise to relative shift of non-isothermal concentration profiles, corresponding two opposite signs of this gradient. The value of the shift increases with increasing the value of ∇<i>T</i> and nonlinearly depends on the time durations of annealing process. It was established too, the dopant diffusion coefficient increases with increasing the ∇<i>T</i> in the vertical direction in the wafer regardless of ∇<i>T</i> sign. The estimation of thermodiffusion parameters was made. The coefficient of mass transfer of intrinsic non-equilibrium defects was introduced into the phenomenological equations of irreversible thermodynamics to explain anomalous high values of heat of transport. This coefficient allows for influence of generation-recombination processes related to intrinsic non-equilibrium defects on the dopant diffusion. The experimentally observed high values of diffusion coefficients and heat of transport are explained using this coefficient." @default.
- W2028932865 created "2016-06-24" @default.
- W2028932865 creator A5031450353 @default.
- W2028932865 creator A5035639983 @default.
- W2028932865 creator A5044072871 @default.
- W2028932865 creator A5077006187 @default.
- W2028932865 creator A5089067813 @default.
- W2028932865 date "2008-03-03" @default.
- W2028932865 modified "2023-09-28" @default.
- W2028932865 title "<title>Features of evolution of implanted profiles during RTA in non-isothermal reactor</title>" @default.
- W2028932865 cites W1496790962 @default.
- W2028932865 cites W1764868392 @default.
- W2028932865 cites W1969987649 @default.
- W2028932865 cites W1970216828 @default.
- W2028932865 cites W1979879505 @default.
- W2028932865 cites W1984128826 @default.
- W2028932865 cites W1984595083 @default.
- W2028932865 cites W1986345690 @default.
- W2028932865 cites W1994469278 @default.
- W2028932865 cites W2001672996 @default.
- W2028932865 cites W2008390402 @default.
- W2028932865 cites W2014952028 @default.
- W2028932865 cites W2023797854 @default.
- W2028932865 cites W2025241552 @default.
- W2028932865 cites W2026873748 @default.
- W2028932865 cites W2029019316 @default.
- W2028932865 cites W2037655617 @default.
- W2028932865 cites W2040038206 @default.
- W2028932865 cites W2044192789 @default.
- W2028932865 cites W2068269427 @default.
- W2028932865 cites W2119469625 @default.
- W2028932865 cites W2152128795 @default.
- W2028932865 cites W2163299941 @default.
- W2028932865 doi "https://doi.org/10.1117/12.802484" @default.
- W2028932865 hasPublicationYear "2008" @default.
- W2028932865 type Work @default.
- W2028932865 sameAs 2028932865 @default.
- W2028932865 citedByCount "0" @default.
- W2028932865 crossrefType "proceedings-article" @default.
- W2028932865 hasAuthorship W2028932865A5031450353 @default.
- W2028932865 hasAuthorship W2028932865A5035639983 @default.
- W2028932865 hasAuthorship W2028932865A5044072871 @default.
- W2028932865 hasAuthorship W2028932865A5077006187 @default.
- W2028932865 hasAuthorship W2028932865A5089067813 @default.
- W2028932865 hasConcept C121332964 @default.
- W2028932865 hasConcept C133347239 @default.
- W2028932865 hasConcept C137109543 @default.
- W2028932865 hasConcept C160671074 @default.
- W2028932865 hasConcept C171250308 @default.
- W2028932865 hasConcept C185592680 @default.
- W2028932865 hasConcept C191897082 @default.
- W2028932865 hasConcept C191952053 @default.
- W2028932865 hasConcept C192562407 @default.
- W2028932865 hasConcept C26873012 @default.
- W2028932865 hasConcept C2777855556 @default.
- W2028932865 hasConcept C2779557605 @default.
- W2028932865 hasConcept C51038369 @default.
- W2028932865 hasConcept C54207081 @default.
- W2028932865 hasConcept C544956773 @default.
- W2028932865 hasConcept C57863236 @default.
- W2028932865 hasConcept C62520636 @default.
- W2028932865 hasConcept C69357855 @default.
- W2028932865 hasConcept C97355855 @default.
- W2028932865 hasConceptScore W2028932865C121332964 @default.
- W2028932865 hasConceptScore W2028932865C133347239 @default.
- W2028932865 hasConceptScore W2028932865C137109543 @default.
- W2028932865 hasConceptScore W2028932865C160671074 @default.
- W2028932865 hasConceptScore W2028932865C171250308 @default.
- W2028932865 hasConceptScore W2028932865C185592680 @default.
- W2028932865 hasConceptScore W2028932865C191897082 @default.
- W2028932865 hasConceptScore W2028932865C191952053 @default.
- W2028932865 hasConceptScore W2028932865C192562407 @default.
- W2028932865 hasConceptScore W2028932865C26873012 @default.
- W2028932865 hasConceptScore W2028932865C2777855556 @default.
- W2028932865 hasConceptScore W2028932865C2779557605 @default.
- W2028932865 hasConceptScore W2028932865C51038369 @default.
- W2028932865 hasConceptScore W2028932865C54207081 @default.
- W2028932865 hasConceptScore W2028932865C544956773 @default.
- W2028932865 hasConceptScore W2028932865C57863236 @default.
- W2028932865 hasConceptScore W2028932865C62520636 @default.
- W2028932865 hasConceptScore W2028932865C69357855 @default.
- W2028932865 hasConceptScore W2028932865C97355855 @default.
- W2028932865 hasLocation W20289328651 @default.
- W2028932865 hasOpenAccess W2028932865 @default.
- W2028932865 hasPrimaryLocation W20289328651 @default.
- W2028932865 hasRelatedWork W1965150531 @default.
- W2028932865 hasRelatedWork W1976900501 @default.
- W2028932865 hasRelatedWork W2017419909 @default.
- W2028932865 hasRelatedWork W2049650749 @default.
- W2028932865 hasRelatedWork W2083937472 @default.
- W2028932865 hasRelatedWork W2162681036 @default.
- W2028932865 hasRelatedWork W2167845802 @default.
- W2028932865 hasRelatedWork W2214936313 @default.
- W2028932865 hasRelatedWork W2949852474 @default.
- W2028932865 hasRelatedWork W3191286252 @default.
- W2028932865 isParatext "false" @default.
- W2028932865 isRetracted "false" @default.
- W2028932865 magId "2028932865" @default.
- W2028932865 workType "article" @default.