FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028966568> ?p ?o ?g. }

• W2028966568 endingPage "96" @default.
• W2028966568 startingPage "91" @default.
• W2028966568 abstract "Si–Ge alloys have been widely studied because of their wide spread applications. RF discharge is a conventionally adopted technique for the deposition of Si–Ge films. Little is known about the deposition and properties of Si–Ge films in low frequency plasmas. The present work concerns an investigation of growth, structure and electronic properties of a-Si1−xGex films deposited by low frequency PECVD, where x is the Ge content in the gas phase, from SiH4 and GeF4 as source gases, and H2 and Ar for dilution. There is no deposition of the film without dilution, while in both cases of H- and Ar-dilution, the growth is observed over the entire x range. However, the deposition rate depends on x and decreases faster in the case of Ar dilution. Both, SIMS and Raman spectra data, demonstrate that incorporation of Ge in the solid phase reaches saturation at x≈0.5. In Raman spectra, the scattering related to Si crystalline phase (line at k=520 cm−1) increases and new lines in vicinity of k=480 cm−1 appear with x. It suggests a change in the local structure around Si atoms. The electrical properties were studied by measurements of the temperature dependence of the conductivity. The reduction of the activation energy from 0.86 to 0.39 eV and the increase of room temperature conductivity from 1 × 10−9 to 2.1 × 10−4 Ω−1 cm−1 were observed with the changes of x from 0 (Si) to 1(Ge). No correlation between pre-exponent factor of conductivity σ0 and activation energy was observed in the samples studied in contrast with a-Si–Ge films deposited from mixtures with GeH4." @default.
• W2028966568 created "2016-06-24" @default.
• W2028966568 creator A5003836710 @default.
• W2028966568 creator A5034449616 @default.
• W2028966568 creator A5041256158 @default.
• W2028966568 creator A5052376128 @default.
• W2028966568 creator A5068391804 @default.
• W2028966568 creator A5090225553 @default.
• W2028966568 date "2004-06-01" @default.
• W2028966568 modified "2023-09-27" @default.
• W2028966568 title "Low frequency plasma deposition and characterization of Si1−xGex:H,F films" @default.
• W2028966568 cites W1541256074 @default.
• W2028966568 cites W1936687270 @default.
• W2028966568 cites W1964267081 @default.
• W2028966568 cites W1975671483 @default.
• W2028966568 cites W1976034284 @default.
• W2028966568 cites W1982663947 @default.
• W2028966568 cites W2002592440 @default.
• W2028966568 cites W2021469462 @default.
• W2028966568 cites W2066048174 @default.
• W2028966568 cites W2068802027 @default.
• W2028966568 cites W2313805696 @default.
• W2028966568 cites W2325583761 @default.
• W2028966568 cites W2332605430 @default.
• W2028966568 doi "https://doi.org/10.1016/j.jnoncrysol.2004.02.028" @default.
• W2028966568 hasPublicationYear "2004" @default.
• W2028966568 type Work @default.
• W2028966568 sameAs 2028966568 @default.
• W2028966568 citedByCount "19" @default.
• W2028966568 countsByYear W20289665682012 @default.
• W2028966568 countsByYear W20289665682013 @default.
• W2028966568 countsByYear W20289665682014 @default.
• W2028966568 countsByYear W20289665682018 @default.
• W2028966568 countsByYear W20289665682019 @default.
• W2028966568 countsByYear W20289665682022 @default.
• W2028966568 crossrefType "journal-article" @default.
• W2028966568 hasAuthorship W2028966568A5003836710 @default.
• W2028966568 hasAuthorship W2028966568A5034449616 @default.
• W2028966568 hasAuthorship W2028966568A5041256158 @default.
• W2028966568 hasAuthorship W2028966568A5052376128 @default.
• W2028966568 hasAuthorship W2028966568A5068391804 @default.
• W2028966568 hasAuthorship W2028966568A5090225553 @default.
• W2028966568 hasConcept C113196181 @default.
• W2028966568 hasConcept C114614502 @default.
• W2028966568 hasConcept C119599485 @default.
• W2028966568 hasConcept C120665830 @default.
• W2028966568 hasConcept C121332964 @default.
• W2028966568 hasConcept C127413603 @default.
• W2028966568 hasConcept C131540310 @default.
• W2028966568 hasConcept C147789679 @default.
• W2028966568 hasConcept C151730666 @default.
• W2028966568 hasConcept C169573571 @default.
• W2028966568 hasConcept C171250308 @default.
• W2028966568 hasConcept C178790620 @default.
• W2028966568 hasConcept C185592680 @default.
• W2028966568 hasConcept C19067145 @default.
• W2028966568 hasConcept C192562407 @default.
• W2028966568 hasConcept C2816523 @default.
• W2028966568 hasConcept C33923547 @default.
• W2028966568 hasConcept C38347018 @default.
• W2028966568 hasConcept C40003534 @default.
• W2028966568 hasConcept C43617362 @default.
• W2028966568 hasConcept C44280652 @default.
• W2028966568 hasConcept C64297162 @default.
• W2028966568 hasConcept C69990965 @default.
• W2028966568 hasConcept C86803240 @default.
• W2028966568 hasConcept C96618451 @default.
• W2028966568 hasConcept C97355855 @default.
• W2028966568 hasConcept C9930424 @default.
• W2028966568 hasConceptScore W2028966568C113196181 @default.
• W2028966568 hasConceptScore W2028966568C114614502 @default.
• W2028966568 hasConceptScore W2028966568C119599485 @default.
• W2028966568 hasConceptScore W2028966568C120665830 @default.
• W2028966568 hasConceptScore W2028966568C121332964 @default.
• W2028966568 hasConceptScore W2028966568C127413603 @default.
• W2028966568 hasConceptScore W2028966568C131540310 @default.
• W2028966568 hasConceptScore W2028966568C147789679 @default.
• W2028966568 hasConceptScore W2028966568C151730666 @default.
• W2028966568 hasConceptScore W2028966568C169573571 @default.
• W2028966568 hasConceptScore W2028966568C171250308 @default.
• W2028966568 hasConceptScore W2028966568C178790620 @default.
• W2028966568 hasConceptScore W2028966568C185592680 @default.
• W2028966568 hasConceptScore W2028966568C19067145 @default.
• W2028966568 hasConceptScore W2028966568C192562407 @default.
• W2028966568 hasConceptScore W2028966568C2816523 @default.
• W2028966568 hasConceptScore W2028966568C33923547 @default.
• W2028966568 hasConceptScore W2028966568C38347018 @default.
• W2028966568 hasConceptScore W2028966568C40003534 @default.
• W2028966568 hasConceptScore W2028966568C43617362 @default.
• W2028966568 hasConceptScore W2028966568C44280652 @default.
• W2028966568 hasConceptScore W2028966568C64297162 @default.
• W2028966568 hasConceptScore W2028966568C69990965 @default.
• W2028966568 hasConceptScore W2028966568C86803240 @default.
• W2028966568 hasConceptScore W2028966568C96618451 @default.
• W2028966568 hasConceptScore W2028966568C97355855 @default.
• W2028966568 hasConceptScore W2028966568C9930424 @default.
• W2028966568 hasLocation W20289665681 @default.
• W2028966568 hasOpenAccess W2028966568 @default.

• next