Matches in SemOpenAlex for { <https://semopenalex.org/work/W2028984914> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W2028984914 endingPage "702" @default.
- W2028984914 startingPage "698" @default.
- W2028984914 abstract "The extraordinary optical transmission through a sub-wavelength size metal-aperture and metamaterials has been tremendous interests for the untilization of the surface plasmon polariton (SPP). Its technology, however, is hard to apply for the optical lithography process. In this study, a maskless plasmonic lithography (MPL) is modeled and simulated for 15-nm critical dimension (CD). The near-field intensity with the plasmonic phenomena of aperture shapes is described due to aperture parameters by using a scattering matrix (S-matrix) analysis method and the finite difference time domain (FDTD) method. MPL parameters of bowtie structures are optimized and improved for the imperfection of the resist pattern. The most dominant parameter on CD is gap size of bowtie by Taguchi method." @default.
- W2028984914 created "2016-06-24" @default.
- W2028984914 creator A5045195859 @default.
- W2028984914 date "2015-06-01" @default.
- W2028984914 modified "2023-09-27" @default.
- W2028984914 title "Impact of process parameters on pattern formation in the maskless plasmonic computational lithography" @default.
- W2028984914 cites W1969487701 @default.
- W2028984914 cites W1972791776 @default.
- W2028984914 cites W1973509346 @default.
- W2028984914 cites W1975313226 @default.
- W2028984914 cites W1976210588 @default.
- W2028984914 cites W1980269750 @default.
- W2028984914 cites W2025864484 @default.
- W2028984914 cites W2042614187 @default.
- W2028984914 cites W2055541726 @default.
- W2028984914 cites W2119645153 @default.
- W2028984914 cites W2127639166 @default.
- W2028984914 cites W2135346036 @default.
- W2028984914 cites W2139516501 @default.
- W2028984914 cites W2165498076 @default.
- W2028984914 cites W2318520844 @default.
- W2028984914 doi "https://doi.org/10.1016/j.cap.2015.03.016" @default.
- W2028984914 hasPublicationYear "2015" @default.
- W2028984914 type Work @default.
- W2028984914 sameAs 2028984914 @default.
- W2028984914 citedByCount "1" @default.
- W2028984914 countsByYear W20289849142019 @default.
- W2028984914 crossrefType "journal-article" @default.
- W2028984914 hasAuthorship W2028984914A5045195859 @default.
- W2028984914 hasConcept C110367647 @default.
- W2028984914 hasConcept C110879396 @default.
- W2028984914 hasConcept C120665830 @default.
- W2028984914 hasConcept C121332964 @default.
- W2028984914 hasConcept C136676167 @default.
- W2028984914 hasConcept C137905882 @default.
- W2028984914 hasConcept C150835508 @default.
- W2028984914 hasConcept C171250308 @default.
- W2028984914 hasConcept C184880428 @default.
- W2028984914 hasConcept C192562407 @default.
- W2028984914 hasConcept C200274948 @default.
- W2028984914 hasConcept C204223013 @default.
- W2028984914 hasConcept C24890656 @default.
- W2028984914 hasConcept C2779227376 @default.
- W2028984914 hasConcept C49040817 @default.
- W2028984914 hasConcept C53524968 @default.
- W2028984914 hasConcept C6260449 @default.
- W2028984914 hasConcept C78336883 @default.
- W2028984914 hasConceptScore W2028984914C110367647 @default.
- W2028984914 hasConceptScore W2028984914C110879396 @default.
- W2028984914 hasConceptScore W2028984914C120665830 @default.
- W2028984914 hasConceptScore W2028984914C121332964 @default.
- W2028984914 hasConceptScore W2028984914C136676167 @default.
- W2028984914 hasConceptScore W2028984914C137905882 @default.
- W2028984914 hasConceptScore W2028984914C150835508 @default.
- W2028984914 hasConceptScore W2028984914C171250308 @default.
- W2028984914 hasConceptScore W2028984914C184880428 @default.
- W2028984914 hasConceptScore W2028984914C192562407 @default.
- W2028984914 hasConceptScore W2028984914C200274948 @default.
- W2028984914 hasConceptScore W2028984914C204223013 @default.
- W2028984914 hasConceptScore W2028984914C24890656 @default.
- W2028984914 hasConceptScore W2028984914C2779227376 @default.
- W2028984914 hasConceptScore W2028984914C49040817 @default.
- W2028984914 hasConceptScore W2028984914C53524968 @default.
- W2028984914 hasConceptScore W2028984914C6260449 @default.
- W2028984914 hasConceptScore W2028984914C78336883 @default.
- W2028984914 hasFunder F4320322120 @default.
- W2028984914 hasIssue "6" @default.
- W2028984914 hasLocation W20289849141 @default.
- W2028984914 hasOpenAccess W2028984914 @default.
- W2028984914 hasPrimaryLocation W20289849141 @default.
- W2028984914 hasRelatedWork W1982617849 @default.
- W2028984914 hasRelatedWork W1983208076 @default.
- W2028984914 hasRelatedWork W1990624089 @default.
- W2028984914 hasRelatedWork W2003513047 @default.
- W2028984914 hasRelatedWork W2018557707 @default.
- W2028984914 hasRelatedWork W2023023346 @default.
- W2028984914 hasRelatedWork W2028984914 @default.
- W2028984914 hasRelatedWork W2073722722 @default.
- W2028984914 hasRelatedWork W2106583654 @default.
- W2028984914 hasRelatedWork W3119949680 @default.
- W2028984914 hasVolume "15" @default.
- W2028984914 isParatext "false" @default.
- W2028984914 isRetracted "false" @default.
- W2028984914 magId "2028984914" @default.
- W2028984914 workType "article" @default.