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- W2028986972 abstract "Carl Zeiss is currently in the final phase of an AIMS 157 development program in cooperation with Selete, Infineon and International SEMATECH. Based on Carl Zeiss' proven AIMS (Aerial Image Measurement System) technology, the new tool can optically emulate the aerial image generated in any given 157 nm scanner. Beta tools will be shipped throughout 2003. In this work the AIMS fab 157 hardware concept will be described. Latest measurements show that compared to first measurements CD repeatability and illumination uniformity could be significantly improved." @default.
- W2028986972 created "2016-06-24" @default.
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- W2028986972 date "2003-08-26" @default.
- W2028986972 modified "2023-09-26" @default.
- W2028986972 title "Actinic aerial image measurement tool for 157-nm lithography" @default.
- W2028986972 doi "https://doi.org/10.1117/12.504064" @default.
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