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• W2029085274 abstract "A representation method for line edge roughness (LER) parameters based on wavelet-analysis is proposed. Multi-resolution analysis is processed on both spatial features and frequency features of line edge. Different feature details are achieved with different analysis resolution. The features of line edge are able to be represented well by wavelet analysis. And an extraction method for contour line of LER is designed based on wavelet baseline. The experimental results show that more details of LER features are obtained by multi-resolution wavelet analysis. The method is feasible to estimate the nano-scale LER. Therefore, it is possible to reduce the processing errors of nano-scale manufacturing line." @default.
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• W2029085274 date "2012-02-01" @default.
• W2029085274 modified "2023-09-24" @default.
• W2029085274 title "Multi-Resolution Analysis of Critical Dimension Line Edge Roughness" @default.
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• W2029085274 doi "https://doi.org/10.4028/www.scientific.net/amr.472-475.2436" @default.
• W2029085274 hasPublicationYear "2012" @default.
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